| Design of a VLS grating-lens hybrid component for miniature spectrometer | |
| Hua Li; Hui Lin | |
| 2012 | |
| 会议名称 | The 2nd International Forum on Micro Manufacturing |
| 会议地点 | 中国 |
| 英文摘要 | we propose a micro varied-line-spacing (VLS) grating-lens hybrid component that integrates the collimation, dispersion and focus functions for use in a miniature spectrometer. We adopt the principle of least wave change to design and optimize the VLS grating pattern on the spherical lens surface, and then build a model in ZEMAX to simulate the spectral resolution performance. The best spectral resolution turns out to be 1nm at the center wavelength of the target wavelength range. The resolution across the wavelength range from 450nm to 650nm is better than 4nm. |
| 收录类别 | EI |
| 语种 | 英语 |
| 内容类型 | 会议论文 |
| 源URL | [http://ir.siat.ac.cn:8080/handle/172644/3815]  |
| 专题 | 深圳先进技术研究院_集成所 |
| 作者单位 | 2012 |
| 推荐引用方式 GB/T 7714 | Hua Li,Hui Lin. Design of a VLS grating-lens hybrid component for miniature spectrometer[C]. 见:The 2nd International Forum on Micro Manufacturing. 中国. |
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