A compact two-dimensional laser scanner based on piezoelectric actuators

	A compact two-dimensional laser scanner based on piezoelectric actuators
	Chen Wei; Chen Sihai; Luo Dong; Jiao Guohua
刊名	REVIEW OF SCIENTIFIC INSTRUMENTS
	2015
英文摘要	A compact two-dimensional (2D) single-mirror laser scanner has been designed and prototyped that is structurally small and has high accuracy. The mirror of the scanner is driven by three piezoelectric actuators aligned in parallel and staggered to form a triangular base to provide structural compactness and close drive axes. The mechanical structure and 2D tilt principle of the scanner were analyzed and the architecture was tested. With an asymmetric structure, the scanner has an optical angle of 2.558◦ and a principle resonance frequency at 1036.8 Hz in the x-axis and 4.495◦ at 654.0 Hz in the y-axis. Experimental results suggest that, with hysteresis compensation, the nonlinearity of the scanner is reduced to ±0.25% for the x-axis and ±0.3% for the y-axis. With an open-loop controller, the laser scanner can realize linear scanning at several hundred hertz
收录类别	SCI
原文出处	http://dx.doi.org/10.1063/1.4904974
语种	英语
内容类型	期刊论文
源URL	[http://ir.siat.ac.cn:8080/handle/172644/6590]
专题	深圳先进技术研究院_集成所
作者单位	REVIEW OF SCIENTIFIC INSTRUMENTS
推荐引用方式 GB/T 7714	Chen Wei,Chen Sihai,Luo Dong,et al. A compact two-dimensional laser scanner based on piezoelectric actuators[J]. REVIEW OF SCIENTIFIC INSTRUMENTS,2015.
APA	Chen Wei,Chen Sihai,Luo Dong,&Jiao Guohua.(2015).A compact two-dimensional laser scanner based on piezoelectric actuators.REVIEW OF SCIENTIFIC INSTRUMENTS.
MLA	Chen Wei,et al."A compact two-dimensional laser scanner based on piezoelectric actuators".REVIEW OF SCIENTIFIC INSTRUMENTS (2015).