Dielectric enhancement of BaTiO 3/BaSrTiO 3/SrTiO 3 multilayer thin films deposited on Pt/Ti/SiO 2/Si substrates by sol–gel method

	Dielectric enhancement of BaTiO 3/BaSrTiO 3/SrTiO 3 multilayer thin films deposited on Pt/Ti/SiO 2/Si substrates by sol–gel method
	Zhao ning; Wan lixi; Cao liqiang; Yu daquan; Yu shuhui; Sun rong
刊名	Materials Letters
	2011
卷号	65 期号:23 页码:3574-3576
英文摘要	Polycrystalline BaTiO3/Ba0.6Sr0.4TiO3/SrTiO3 (BT/BST/ST) multilayer thin films with different periodicities have been deposited on Pt/Ti/SiO2/Si substrates by using a sol–gel method. The multilayer thin films were crack free, compact and crystallized in a perovskite structure. The dielectric constant of the multilayer thin films was significantly increased and the dielectric loss was almost the same as those of uniform BT, ST and BST thin films. The dielectric constant increased with increasing stacking periodicity as the thickness of each individual layer decreased. The multilayer thin films showed excellent dielectric properties and can be promisingly used for the dielectric layer of silicon-based embedded capacitors in package substrate.
收录类别	SCI
原文出处	http://www.sciencedirect.com/science/article/pii/S0167577X11008998
语种	英语
内容类型	期刊论文
源URL	[http://ir.siat.ac.cn:8080/handle/172644/3236]
专题	深圳先进技术研究院_集成所
作者单位	Materials Letters
推荐引用方式 GB/T 7714	Zhao ning,Wan lixi,Cao liqiang,et al. Dielectric enhancement of BaTiO 3/BaSrTiO 3/SrTiO 3 multilayer thin films deposited on Pt/Ti/SiO 2/Si substrates by sol–gel method[J]. Materials Letters,2011,65(23):3574-3576.
APA	Zhao ning,Wan lixi,Cao liqiang,Yu daquan,Yu shuhui,&Sun rong.(2011).Dielectric enhancement of BaTiO 3/BaSrTiO 3/SrTiO 3 multilayer thin films deposited on Pt/Ti/SiO 2/Si substrates by sol–gel method.Materials Letters,65(23),3574-3576.
MLA	Zhao ning,et al."Dielectric enhancement of BaTiO 3/BaSrTiO 3/SrTiO 3 multilayer thin films deposited on Pt/Ti/SiO 2/Si substrates by sol–gel method".Materials Letters 65.23(2011):3574-3576.