Microstructure and electrical properties of Mn-doped barium strontium titanate thin films prepared on copper foils

	Microstructure and electrical properties of Mn-doped barium strontium titanate thin films prepared on copper foils
	Yanhua Fan; Shuhui Yu; Rong Sun; Lei Li; Yansheng Yin; Ka-Wai Wong; Ruxu Du
刊名	Applied Surface Science
	2010
卷号	256 期号:22 页码:6531-6535
英文摘要	Ba(0.7-x)Sr(0.3)Mn(x)TiO(3) (x = 0, 0.025, 0.05) thin films have been prepared on copper foils using sol-gel method. The films were processed in an atmosphere with low oxygen pressure so that the substrate oxidation is avoided and the formation of the perovskite phase is allowed. XRD and SEM results showed that Mn doping enhanced the crystallization of the perovskite phase in the films. TheMnsubstitution prevents the reduction of Ti(4+) to Ti(3+), which is supported by XPS analysis. The Ba(0.7-x)Sr(0.3)Mn(x)TiO(3) film with x = 0.025 (BSMT25) exhibits preferred dielectric behavior and a lower leakage current density among the three thin films. The dielectric constant and loss of the BSMT25 film are 1213.5 and 0.065 at 1MHz and around zero field, which are mostly desired for embedded capacitor applications. The mechanism of Mn doping on improving the electrical properties of barium strontium titanate (BST) thin films was investigated.
收录类别	SCI
原文出处	http://www.sciencedirect.com/science/article/pii/S0169433210005544#
语种	英语
内容类型	期刊论文
源URL	[http://ir.siat.ac.cn:8080/handle/172644/2733]
专题	深圳先进技术研究院_集成所
作者单位	Applied Surface Science
推荐引用方式 GB/T 7714	Yanhua Fan,Shuhui Yu,Rong Sun,et al. Microstructure and electrical properties of Mn-doped barium strontium titanate thin films prepared on copper foils[J]. Applied Surface Science,2010,256(22):6531-6535.
APA	Yanhua Fan.,Shuhui Yu.,Rong Sun.,Lei Li.,Yansheng Yin.,...&Ruxu Du.(2010).Microstructure and electrical properties of Mn-doped barium strontium titanate thin films prepared on copper foils.Applied Surface Science,256(22),6531-6535.
MLA	Yanhua Fan,et al."Microstructure and electrical properties of Mn-doped barium strontium titanate thin films prepared on copper foils".Applied Surface Science 256.22(2010):6531-6535.