Design, Fabrication and Testing of CNT Based ISFET for NANO pH Sensor Application: A Preliminary Study

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	Design, Fabrication and Testing of CNT Based ISFET for NANO pH Sensor Application: A Preliminary Study
	Dong, Zhuxin; Wejinya, Uchechukwu C.; Yu HB(于海波); Elhajj, Imad H.
	2009
会议名称	2009 IEEE/ASME International Conference on Advanced Intelligent Mechatronics
会议日期	July 14-17, 2009
会议地点	Singapore
页码	1556-1561
通讯作者	Wejinya, UC
中文摘要	In recent years, there has been increasing interest in monitoring and controlling of pH. It has become an important aspect of many industrial wastewater treatment processes. At the same time, the demand for smaller electronic devices used for various industrial and commercial applications has greatly increased. Micro and nano materials, such as Carbon Nanotubes (CNTs), are known for their excellent electrical and mechanical properties, as well as for their small size, therefore they are good candidates to manufacture micro or nano electronic devices. These devices can be used for pH control. However, this cannot be achieved unless CNTs with metallic or semiconducting band structures can be successfully deposited and separated. In these processes, microchip fabrication and deposition of CNTs using Dielectrophoresis (DEP) are involved. Comparing with some traditional pH sensors, which mainly consist of Ion-Sensitive Field Effect Transistor (ISFET), signal operational amplifier and Analog Digital Convert (ADC), Nano pH sensor with CNTs may provide more benefits owing to their unique properties. For example, 70-80% of multi-walled CNTs (MWCNTs) are metallic and have high current density, which means this kind of micro device has a linear relationship of I-V characteristic and can produce signal strong enough to make operational amplifying circuits unnecessary. In addition, to manufacture smaller devices more functional becomes possible as CNTs are tiny and compact.
收录类别	EI ; CPCI（ISTP）
产权排序	2
会议主办者	IEEE, ASME
会议录	2009 IEEE/ASME INTERNATIONAL CONFERENCE ON ADVANCED INTELLIGENT MECHATRONICS, VOLS 1-3
会议录出版者	IEEE
会议录出版地	NEW YORK
语种	英语
ISSN号	2159-6255
ISBN号	978-1-4244-2852-6
WOS记录号	WOS:000277062800264
内容类型	会议论文
源URL	[http://ir.sia.cn/handle/173321/19866]
专题	沈阳自动化研究所_机器人学研究室
推荐引用方式 GB/T 7714	Dong, Zhuxin,Wejinya, Uchechukwu C.,Yu HB,et al. Design, Fabrication and Testing of CNT Based ISFET for NANO pH Sensor Application: A Preliminary Study[C]. 见:2009 IEEE/ASME International Conference on Advanced Intelligent Mechatronics. Singapore. July 14-17, 2009.