The figure simulation of the polishing pad in the continuous polishing process

CORC > 上海光学精密机械研究所 > 中国科学院上海光学精密机械研究所 > 中科院强激光材料重点实验室

	The figure simulation of the polishing pad in the continuous polishing process
	Shan, Haiyang ; Xu, Xueke ; He, Hongbo ; Liu, Shijie ; Wei, Chaoyang ; Yi, Kui ; Shao, Jianda
	2014
会议名称	conference on pacific rim laser damage (pld) on optical materials for high power lasers
通讯作者	shan, hy (reprint author), chinese acad sci, shanghai inst opt & fine mech, key lab mat high power laser, shanghai 201800, peoples r china.
英文摘要	the figures of the polishing pad are of great significance for the figures of optical workpieces in the continuous polishing process. three main factors which affect the figures of the pad, including the polishing pad creep deformation, the calibration plate grinding and the ambient change in temperature, are analyzed in this work. processing parameters including the eccentricity between the polishing pad and the calibration plate, the calibration plate thickness, angular velocities of the pad are introduced in this analytic process. with this method, the figures of the polishing pad in the continuous polishing can be obtained. this work provides theoretical guidance for the deterministic processing of the continuous polishing process.
收录类别	CPCI
会议录	pacific rim laser damage 2014: optical materials for high power lasers
会议录出版者	spie-int soc optical engineering
语种	英语
内容类型	会议论文
源URL	[http://ir.siom.ac.cn/handle/181231/17042]
专题	上海光学精密机械研究所_中科院强激光材料重点实验室
作者单位	1.[Shan, Haiyang 2.Xu, Xueke 3.He, Hongbo 4.Liu, Shijie 5.Wei, Chaoyang 6.Yi, Kui 7.Shao, Jianda] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Key Lab Mat High Power Laser, Shanghai 201800, Peoples R China 8.[Shan, Haiyang] Univ Chinese Acad Sci, Beijing 100049, Peoples R China
推荐引用方式 GB/T 7714	Shan, Haiyang,Xu, Xueke,He, Hongbo,et al. The figure simulation of the polishing pad in the continuous polishing process[C]. 见:conference on pacific rim laser damage (pld) on optical materials for high power lasers.