Laser-induced damage resistance of AlF3 films

CORC > 上海光学精密机械研究所 > 中国科学院上海光学精密机械研究所 > 中科院强激光材料重点实验室

	Laser-induced damage resistance of AlF3 films
	Sun, Jian ; Li, Xu ; Zhang, Weili ; Yi, Kui ; Shao, Jianda
	2013
会议名称	conference on pacific rim laser damage - optical materials for high power lasers
通讯作者	sun, j (reprint author), chinese acad sci, shanghai inst opt & fine mech, key lab mat high power laser, shanghai 201800, peoples r china.
英文摘要	alf3 thin films were prepared by thermal evaporation at different substrate temperatures and deposition rates. the relationships between optical properties, mechanical properties and laser-induced damage threshold (lidt) at 355nm of alf3 films were discussed. both absorption and stress increased with increasing substrate temperatures and deposition rates, which was a disadvantage to laser-induced damage resistance. meanwhile, interfacial adhesion and hardness increased with substrate temperatures and deposition rates, which was an advantage to enhance the lidt. the lidt increased from room temperature to 200 degrees c duo to increasing interfacial adhesion and hardness, and then decreased to 300 degrees c duo to increasing absorption and stress. the lidt decreased with deposition rates due to increasing absorption and stress.
收录类别	CPCI
会议录	pacific rim laser damage 2013: optical materials for high power lasers
会议录出版者	spie-int soc optical engineering
语种	英语
内容类型	会议论文
源URL	[http://ir.siom.ac.cn/handle/181231/17035]
专题	上海光学精密机械研究所_中科院强激光材料重点实验室
作者单位	1.[Sun, Jian 2.Li, Xu 3.Zhang, Weili 4.Yi, Kui 5.Shao, Jianda] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Key Lab Mat High Power Laser, Shanghai 201800, Peoples R China
推荐引用方式 GB/T 7714	Sun, Jian,Li, Xu,Zhang, Weili,et al. Laser-induced damage resistance of AlF3 films[C]. 见:conference on pacific rim laser damage - optical materials for high power lasers.