Optical properties of phase shift on reflection and/or transmission through biaxial anisotropic thin films

CORC > 上海光学精密机械研究所 > 中国科学院上海光学精密机械研究所 > 中科院强激光材料重点实验室

	Optical properties of phase shift on reflection and/or transmission through biaxial anisotropic thin films
	Hou, Yongqiang ; Qi, Hongji ; Li, Xu ; He, Kai ; Fang, Ming ; Yi, Kui ; Shao, Jianda
	2013
会议名称	conference on pacific rim laser damage - optical materials for high power lasers
通讯作者	hou, yq (reprint author), chinese acad sci, shanghai inst opt & fine mech, key lab mat high power laser, shanghai 201800, peoples r china.
英文摘要	on the basis of theoretical analysis of biaxial birefringent thin films, this study investigates the optical properties of phase shift on reflection and/or transmission through slanted columnar tio2 sculptured anisotropic thin film (atf) deposited with glancing angle deposition (glad) technique via reactive electron-beam evaporation. the tilted nanocolumn microstructures of thin film induce the optical anisotropy. the optical constants dispersion equations of tio2 atf are determined from fitting the transmittance spectra for s- and p-polarized waves measured at normal and oblique incidence within 400-1200nm. with the extracted structure parameters, the phase shifts of polarized light are analyzed with the characteristic matrix and then measured with spectroscopic ellipsometry in the deposition plane. a reasonably good agreement between the theoretical studies and experimental measurements is obtained. in addition, the dependence of the phase shift on oblique incidence angle is also discussed. the results show a greater generality and superiority of the characteristic matrix method. birefringence of the biaxial atf performed a sophisticated phase modulation with varied incidence angles over a broad range to have a wide-angle phase shift.
收录类别	CPCI
会议录	pacific rim laser damage 2013: optical materials for high power lasers
会议录出版者	spie-int soc optical engineering
语种	英语
内容类型	会议论文
源URL	[http://ir.siom.ac.cn/handle/181231/17033]
专题	上海光学精密机械研究所_中科院强激光材料重点实验室
作者单位	1.[Hou, Yongqiang 2.Qi, Hongji 3.Li, Xu 4.He, Kai 5.Fang, Ming 6.Yi, Kui 7.Shao, Jianda] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Key Lab Mat High Power Laser, Shanghai 201800, Peoples R China
推荐引用方式 GB/T 7714	Hou, Yongqiang,Qi, Hongji,Li, Xu,et al. Optical properties of phase shift on reflection and/or transmission through biaxial anisotropic thin films[C]. 见:conference on pacific rim laser damage - optical materials for high power lasers.