Real-time surface figure monitoring of optical elements in continuous polishing

CORC > 上海光学精密机械研究所 > 中国科学院上海光学精密机械研究所 > 中科院强激光材料重点实验室

	Real-time surface figure monitoring of optical elements in continuous polishing
	Chen, Jun ; Xu, Xueke ; Wei, Chaoyang ; Yang, Minghong ; Gu, Jianxun ; Shao, Jianda
刊名	chin. opt. lett.
	2015
卷号	13 期号:3 页码:32201
通讯作者	xu, xk (reprint author), chinese acad sci, shanghai inst opt & fine mech, shanghai 201800, peoples r china.
英文摘要	a real-time monitoring system is set up based on a computer, dynamic interferometer, beam expanding system, and a beam reflecting system. the stability and repeatability of the monitoring system is verified. a workpiece and a glass monitoring plate are placed in the same ring. the surface figure of the workpiece, monitored by the monitoring plate, synchronizes with the surface of the glass monitoring plate in terms of peak-valley and power. the influence of the reflection and transmission surface are discussed in theory and a numeral deviation in online and offline testing data is quantitatively analyzed. the new method provides a quick and easy real-time method to characterize changes to the optical surface during polishing.
收录类别	SCI
语种	英语
内容类型	期刊论文
版本	出版稿
源URL	[http://ir.siom.ac.cn/handle/181231/14236]
专题	上海光学精密机械研究所_中科院强激光材料重点实验室
作者单位	1.[Chen, Jun 2.Xu, Xueke 3.Wei, Chaoyang 4.Yang, Minghong 5.Gu, Jianxun 6.Shao, Jianda] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China
推荐引用方式 GB/T 7714	Chen, Jun,Xu, Xueke,Wei, Chaoyang,et al. Real-time surface figure monitoring of optical elements in continuous polishing[J]. chin. opt. lett.,2015,13(3):32201.
APA	Chen, Jun,Xu, Xueke,Wei, Chaoyang,Yang, Minghong,Gu, Jianxun,&Shao, Jianda.(2015).Real-time surface figure monitoring of optical elements in continuous polishing.chin. opt. lett.,13(3),32201.
MLA	Chen, Jun,et al."Real-time surface figure monitoring of optical elements in continuous polishing".chin. opt. lett. 13.3(2015):32201.