Laser-induced damage of the optical films prepared by electron beam evaporation and ion beam sputtering in vacuum

CORC > 上海光学精密机械研究所 > 中国科学院上海光学精密机械研究所 > 中科院强激光材料重点实验室

	Laser-induced damage of the optical films prepared by electron beam evaporation and ion beam sputtering in vacuum
	Ling, Xiulan ; Wang, Gao ; Zhao, Yuanan ; Shao, Jianda ; Fan, Zhengxiu
刊名	optik
	2014
卷号	125 期号:21 页码:6474
关键词	Vacuum Laser-induced damage High reflection films Organic contamination
通讯作者	ling, xl (reprint author), north univ china, minist educ, key lab instrumentat sci & dynam measurement, taiyuan 030051, peoples r china.
英文摘要	the laser-induced damage characteristics and adsorption effects of organic contamination molecules of two high reflectors (hr) prepared by electron beam evaporation (eb) and ion beam sputtering (ibs) method at 1064 nm is investigated in vacuum. it is found that eb films show the performance degradation of laser induced damages in vacuum while for ibs film, seems to have no this effect, in comparison with air environment. in addition, eb coatings also have the strong affinity with organic contamination molecules, in contrast of ibs films. the results reveal that ion beam sputtering (ibs) method seem to be one of the favorite film deposition techniques of the optical films used in vacuum and space environments. (c) 2014 elsevier gmbh. all rights reserved.
收录类别	SCI
语种	英语
内容类型	期刊论文
版本	出版稿
源URL	[http://ir.siom.ac.cn/handle/181231/13813]
专题	上海光学精密机械研究所_中科院强激光材料重点实验室
作者单位	1.[Ling, Xiulan 2.Wang, Gao] North Univ China, Minist Educ, Key Lab Instrumentat Sci & Dynam Measurement, Taiyuan 030051, Peoples R China 3.[Ling, Xiulan 4.Wang, Gao] North Univ China, Key Lab Sci & Technol Elect Test & Measurement, Taiyuan 030051, Peoples R China 5.[Ling, Xiulan 6.Zhao, Yuanan 7.Shao, Jianda 8.Fan, Zhengxiu] Shanghai Inst Opt & Fine Mech, Key Lab Mat Sci & Technol High Power Lasers, Shanghai 201800, Peoples R China
推荐引用方式 GB/T 7714	Ling, Xiulan,Wang, Gao,Zhao, Yuanan,et al. Laser-induced damage of the optical films prepared by electron beam evaporation and ion beam sputtering in vacuum[J]. optik,2014,125(21):6474.
APA	Ling, Xiulan,Wang, Gao,Zhao, Yuanan,Shao, Jianda,&Fan, Zhengxiu.(2014).Laser-induced damage of the optical films prepared by electron beam evaporation and ion beam sputtering in vacuum.optik,125(21),6474.
MLA	Ling, Xiulan,et al."Laser-induced damage of the optical films prepared by electron beam evaporation and ion beam sputtering in vacuum".optik 125.21(2014):6474.