Optimization of thickness uniformity of coatings on spherical substrates using shadow masks in a planetary rotation system

CORC > 上海光学精密机械研究所 > 中国科学院上海光学精密机械研究所 > 中科院强激光材料重点实验室

	Optimization of thickness uniformity of coatings on spherical substrates using shadow masks in a planetary rotation system
	Sun, Jian ; Zhang, Weili ; Yi, Kui ; Shao, Jianda
刊名	chin. opt. lett.
	2014
卷号	12 期号:5 页码:53101
通讯作者	zhang, wl (reprint author), chinese acad sci, shanghai inst opt & fine mech, key lab mat high power laser, shanghai 201800, peoples r china.
英文摘要	a model is developed to improve thickness uniformity of coatings on spherical substrates rapidly and automatically using fixed shadow masks in a planetary rotation system. the coating thickness is accurately represented by a function composed of basic thickness, self-shadow effect, and shadow mask function. a type of mask with parabolic contours is proposed, and the thickness uniformity of coatings on spherical substrates can be improved in a large range of ratios of clear aperture (ca) to radius of curvature (roc) by optimizing shadow masks using a numerical optimization algorithm. theoretically, the thickness uniformity improves to more than 97.5% of ca/roc from -1.9 to 1.9. experimentally, the thickness uniformities of coatings on a convex spherical substrate (ca/roc = 1.53) and on a concave spherical substrate (ca/roc=-1.65) improve to be better than 98.5% after corrected by the shadow masks.
收录类别	SCI
语种	英语
内容类型	期刊论文
版本	出版稿
源URL	[http://ir.siom.ac.cn/handle/181231/13756]
专题	上海光学精密机械研究所_中科院强激光材料重点实验室
作者单位	1.[Sun, Jian 2.Zhang, Weili 3.Yi, Kui 4.Shao, Jianda] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Key Lab Mat High Power Laser, Shanghai 201800, Peoples R China 5.[Sun, Jian] Univ Chinese Acad Sci, Beijing 100049, Peoples R China
推荐引用方式 GB/T 7714	Sun, Jian,Zhang, Weili,Yi, Kui,et al. Optimization of thickness uniformity of coatings on spherical substrates using shadow masks in a planetary rotation system[J]. chin. opt. lett.,2014,12(5):53101.
APA	Sun, Jian,Zhang, Weili,Yi, Kui,&Shao, Jianda.(2014).Optimization of thickness uniformity of coatings on spherical substrates using shadow masks in a planetary rotation system.chin. opt. lett.,12(5),53101.
MLA	Sun, Jian,et al."Optimization of thickness uniformity of coatings on spherical substrates using shadow masks in a planetary rotation system".chin. opt. lett. 12.5(2014):53101.