High-efficiency, broad-bandwidth metal/multilayerdielectric gratings

CORC > 上海光学精密机械研究所 > 中国科学院上海光学精密机械研究所 > 中科院强激光材料重点实验室

	High-efficiency, broad-bandwidth metal/multilayerdielectric gratings
	Guan, Heyuan ; Chen, Hui ; Wu, Jianbo ; Jin, Yunxia ; Kong, Fanyu ; Liu, Shijie ; Yi, Kui ; Shao, Jianda
刊名	opt. lett.
	2014
卷号	39 期号:1 页码:170
关键词	PULSE-COMPRESSION GRATINGS LASER-INDUCED DAMAGE DIELECTRIC GRATINGS REFLECTION GRATINGS BAND THRESHOLD DESIGN
通讯作者	jin, yx (reprint author), chinese acad sci, shanghai inst opt & fine mech, key lab mat high power laser, shanghai 201800, peoples r china.
英文摘要	we report on an 800 nm center-wavelength metal/multilayer-dielectric grating (mmdg) with broadband, high diffraction efficiency. the trapezoidal grating ridge consists of an hfo2 layer sandwiched between two sio2 films. combining the advantages of sio2 and hfo2, the grating ridge reduces the difficulties of grating ridge attainment. for such a configuration, high-performance mmdg can be successfully fabricated using the existing technology. experimentally we demonstrated a 163 nm bandwidth mmdg with -1st-order diffraction efficiency greater than 90%. the fabricated mmdg achieved high performance as the design with large fabrication tolerances. (c) 2013 optical society of america
收录类别	SCI
语种	英语
内容类型	期刊论文
版本	出版稿
源URL	[http://ir.siom.ac.cn/handle/181231/13252]
专题	上海光学精密机械研究所_中科院强激光材料重点实验室
作者单位	1.[Guan, Heyuan 2.Wu, Jianbo 3.Jin, Yunxia 4.Kong, Fanyu 5.Liu, Shijie 6.Yi, Kui 7.Shao, Jianda] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Key Lab Mat High Power Laser, Shanghai 201800, Peoples R China 8.[Guan, Heyuan] Chinese Acad Sci, Grad Sch, Beijing 10
推荐引用方式 GB/T 7714	Guan, Heyuan,Chen, Hui,Wu, Jianbo,et al. High-efficiency, broad-bandwidth metal/multilayerdielectric gratings[J]. opt. lett.,2014,39(1):170.
APA	Guan, Heyuan.,Chen, Hui.,Wu, Jianbo.,Jin, Yunxia.,Kong, Fanyu.,...&Shao, Jianda.(2014).High-efficiency, broad-bandwidth metal/multilayerdielectric gratings.opt. lett.,39(1),170.
MLA	Guan, Heyuan,et al."High-efficiency, broad-bandwidth metal/multilayerdielectric gratings".opt. lett. 39.1(2014):170.