QQ客服 官方微博 反馈留言

题名	大量程高精度光学间距测量系统的研究
作者	师中华
学位类别	硕士
答辩日期	2016
授予单位	中国科学院上海光学精密机械研究所
导师	杨宝喜
关键词	光学镜头，镜面间距，低相干测量，MEMS光开关，差分测量
其他题名	Research on Measurement System of Optical Spacing with Large Range and High Precision
中文摘要	透镜做为大多数光学系统中最基本的光学元件，是获取外部光学信息的重要结构，在透镜加工过程中提高透镜中心厚度的加工精度以及在装配过程中提高光学元件的安装精度是保证光学系统性能的关键所在，为实现光学系统中透镜中心厚度和透镜间距的高精度非接触测量，本论文开展了基于低相干干涉测量原理的镜面间距测量技术研究，在研究进展、测量原理、系统结构、处理算法和实际应用等方面开展了研究，主要包括以下几个方面： 1.对国内外现有的镜面间距测量技术进行了总结与分析，了解了目前镜面间距测量技术的发展现状，指出了各种测量方法的优势以及所存在的不足，明确了本论文的研究方向。 2.介绍了镜面间距的测量原理，完成了大量程高精度镜面间距测量系统中光学结构、硬件电路和定位算法的设计，搭建了实验测量系统，利用激光测距结构实现参考臂中扫描反射镜的高精度定位，采用双光开关结构实现了测量范围的增大。 3.开展了对镜面定位算法的研究，具体包括低相干干涉信号的提取、零光程的定位、激光测距干涉周期计数和透镜组中镜面的定位，并建立了测量臂和参考臂的耦合模型用于分析实际的测量系统。 4.研究了镜面间距测量系统中弱信号的提取方法，设计了平衡差分测量结构，并搭建了实际的测量系统，实现了对干涉测量信号中干涉项的提取和直流项的去除，提高了对弱信号的定位精度。
英文摘要	Lens as the most basic optical elements in the optical system, which is important structure to obtain external optical information, improving the machining accuracy of lens in the machining process and the installation precision of optical elements in the assembly process is the key to guarantee performance of optical system, in order to realize non-contact measurement with high precision of the center thickness and spacing of lens, the research of the center thickness and spacing measurement of lens is carried out based on low coherence interference measurement principle, mainly reseach on measuring principle, system structure, processing algorithm and practical application. This thesis includes the following aspects: 1.ummarize and analyze the existing measurement technique of the thickness and spacing of lens at home and abroad, understand the current situation of the thickness and spacing measurement technique of lens, point out the advantages and disadvantages of various measurement methods, clear the research direction of this thesis. 2.Introduce the measuring principle of the thickness and spacing of lens, complete the design of the optical structure, hardware circuit and positioning algorithm of measurement system with large range and high precision. In the experimental measurement system, using laser ranging structure to achieve positioning scanning mirror with high precison, and using the MEMS optical switches to enlarge measuring range. 3.Research on the lens surface positioning algorithm, including low coherence interferometric signal extraction, zero optical path positioning, pulse counting of coherence ranging signal and calculation the thickness and spacing of lens. Establish the coupling model of the measuring arm and the reference arm to analyze actual measurement system. 4.Research on the weak signal extraction method of the thickness and spacing measurement of lens, balanced differential measurement system is designed. In the actual measurement system, the low coherence measurement unit has two signal output terminals which have same DC term and opposite interference term, by using differential amplification effect of the balanced photodetector, the output signal contains only the interference term that can improve positioning accuracy of the weak signal.
语种	中文
内容类型	学位论文
源URL	[http://ir.siom.ac.cn/handle/181231/16956]
专题	上海光学精密机械研究所_学位论文
推荐引用方式 GB/T 7714	师中华. 大量程高精度光学间距测量系统的研究[D]. 中国科学院上海光学精密机械研究所. 2016.

个性服务

查看访问统计

相关权益政策

暂无数据

收藏/分享

除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。