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题名	光学薄膜弱吸收测量技术研究
作者	符燕燕
学位类别	硕士
答辩日期	2015
授予单位	中国科学院上海光学精密机械研究所
导师	李大伟
关键词	吸收测量 光学薄膜 表面热透镜 激光损伤
其他题名	Study on Absorption Measurement Technique of Optical Coatings
中文摘要	光学薄膜是激光系统中不可或缺的光学元件，近年来随着高功率激光技术的发展，对光学薄膜的光学性能、损耗以及抗激光损伤能力的要求也越来越高。光学薄膜吸收是影响薄膜光学性能的重要因素，更是导致薄膜激光损伤的根本原因，因此抑制光学薄膜的吸收一直是普遍关注的课题。要降低光学薄膜的吸收首先要能够准确测量吸收，发展相应的吸收测量技术。现代光学系统尤其是强激光系统中常用光学薄膜的吸收率仅为几十ppm甚至更小，而传统的薄膜吸收测量方法，如分光光度计法、激光量热法、光热辐射法等因为测量灵敏度低，无法满足测量要求。光热技术尤其是表面热透镜技术作为一种无损探测手段因其灵敏度高、调节方便等优点而得到广泛应用。 论文基于表面热透镜原理研究了光学薄膜弱吸收测量技术，对已有的弱吸收测量系统进行了改进，搭建了吸收与损伤实时在线测量系统，并进行了光学薄膜吸收特性与损伤行为的相关研究。概括来说，论文包括以下几部分内容。 （1）论述了薄膜吸收的测量手段，简要介绍了表面热透镜技术测量的基础理论和检测原理，并综述了目前薄膜吸收测量技术的发展现状和趋势； （2）基于原有的1064nm常规弱吸收测量系统，对系统的测量灵敏度、重复精度给出了评价；结合实验中具体的操作过程，对光路和部件进行了改进，对系统日常测试中经常出现的样品表面与移动平台不平、干涉条纹的出现等问题进行了分析与改进，提高了弱吸收测量的稳定性和准确性，实现了数据读取与记录自动化，提高系统测量效率及准确度； （3）搭建了光学薄膜弱吸收与损伤阈值实时在线测试平台，能够对薄膜样品进行吸收与损伤的实时在线测试,对多脉冲作用下的损伤阈值与吸收之间的关系进行了初步研究并总结相应规律； （4）针对环境湿度对光学薄膜样品吸收的影响进行了实验研究；设计并制作了加湿仪器模拟潮湿环境对光学薄膜样品的作用，结果表明样品吸附潮气后有长漂现象，相应的吸收增加，谱线漂移与吸收系数变化趋势与规律较为一致；实验结果为实际薄膜元件使用以及吸收测量中应注意环境湿度的影响提供了参考。 最后总结了全文并对课题工作进行了展望。
英文摘要	Optical coatings are essential to almost all of laser systems. Recently with the development of high power lasers, the optical coatings need to be less absorption and higher resistance to laser irradiation. The absorption of optical coatings affects their optics characters and leads to laser induced damage.In modern optical system, especially in high power laser related system, the absorption of coatings has been reduced to 1ppm magnitude or even lower. Traditional measuring methods for coating absorption including spectrophotometric method, extinction coefficient calculation method, calorimetric method and optitherm radiation method have no enough sensitivity.So STL(Surface Thermal Lens) technique is developed and applied widely. The absorption measurement technique is studied and improvements are done to the present testing system. A new system which can measure absorption and laser induced damage threshold of optical coatings at the same time is built, and the relationship between absorption and laser induced damage threshold is studied. The paper includes four parts. (1) In this part, the overviews of measuring methods of coating absorption are presented. After that, the present state and development of absorption measurement techniques are discussed. (2) Evaluation and improvements are done to the present absorption measurement system. Many parts of the system are recalibrated and improved, and some problems such as interference fringes are analyzed. Also automation of measurement is achieved. All these improvements provide a more precise measurement. (3) A new system which can measure absorption and laser induced damage threshold of optical coatings at the same time is built. The relationship of absorption and damage threshold under multi-pulses is studied. It is found that with higher absorption, the coatings are easier to be damaged under multi-pulses. (4) The influence of humidity on absorption of optical coatings is studied. It is showed that the absorption increases after the sample set in humid environment, also spectral shift is observed. The results are important to the absorption measurement and usage of optical coatings in humid environment. At the end of this paper, a summary of all the works is presented and some suggestions to following works are given.
语种	中文
内容类型	学位论文
源URL	[http://ir.siom.ac.cn/handle/181231/16928]
专题	上海光学精密机械研究所_学位论文
推荐引用方式 GB/T 7714	符燕燕. 光学薄膜弱吸收测量技术研究[D]. 中国科学院上海光学精密机械研究所. 2015.

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