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题名	环抛中抛光胶盘面形在线监控技术研究
作者	陈军
学位类别	硕士
答辩日期	2015
授予单位	中国科学院上海光学精密机械研究所
导师	徐学科
关键词	环形抛光 在线监控 抛光胶盘 面形
其他题名	Research on Real-time Surface Monitoring of Polishing Pad in Continuous Polishing
中文摘要	本文围绕大口径超精密光学元件在环形抛光加工过程中遇到的难题，开展了环形抛光中抛光胶盘面形的在线监控技术研究，并实现了对抛光胶盘面形的在线实时监测。 环形抛光技术由于其独特的全频谱段面形控制优势，成为大口径光学元件加工的首选方式。传统环形抛光技术严重依赖工艺人员的加工经验，通过频繁离线检测待加工元件的面形来判断抛光胶盘面形的变化，该方法导致加工时间不确定和加工效率低，并且容易引入表面疵病等质量问题。本论文基于光学干涉的方法，分析了抛光胶盘面形在线监控技术的基本原理，研究了面形在线监控技术的实现方式，引入“光程差分布”的概念，将发生于元件上下表面自干涉的光程差和元件的面形起伏建立联系，提出了在线实时检测抛光胶盘面形变化的方案。通过引入陪抛片，利用动态干涉仪和扩束系统搭建了激光干涉面形检测系统。通过对其系统稳定性和重复性测试分析，该系统具有较好的环境适应性和系统稳定性，可以应用于抛光胶盘的面形检测实验。阐述了利用激光干涉面形检测系统进行监测抛光胶盘面形变化的具体实施方法。将陪抛片和中等口径钕玻璃元件对称放置在同一工件环中，开展陪抛片和光学元件的在线离线面形检测对比实验，得到在线和离线检测面形PV和Power在趋势上保持一致，在数值上存在一定的偏离，并定量分析影响在线和离线检测面形数值偏离的因素，发现在排除掉抛光热变形和应力变化及元件放置姿态引入的误差外，元件的在线自干涉检测面形和离线检测反射透射面形满足确定的比例关系。利用激光干涉面形检测系统通过检测抛光过程中陪抛片上下表面产生的自干涉条纹和波面，能够实现中等口径光学元件的在线实时监控。 由于元件口径和运动轨迹等抛光参数的差异，陪抛片和大口径元件中心区域的面形在数值和趋势上没有明显的变化规律；陪抛片和距离工件环中心相同距离处大口径元件的面形在趋势和数值上基本保持一致。小尺寸陪抛片的面形变化反映大口径元件的面形变化还需要进一步的研究，需要更大口径的扩束系统以实现对大口径光学元件的全口径检测。
英文摘要	This thesis studies real-time surface monitoring of polishing pad in continuous polishing for large aperture ultra-precision optical elements encountered problems in polishing processing and realizes the real-time surface monitoring of polishing pad. Continuous polishing, the first choice for large aperture optical elements manufacture, has the unique advantages in full-spatial-frequency surface controlling. The surface of polishing pad is inferred by the offline testing surface of workpiece in traditional continuous polishing. Due to the many uncertain factors in the continuous polishing process, the traditional technique, which has an uncertain processing time and unstable processing quality, relies heavily on the experience of the operator. Based on optical interference method, the measurement principles and implementation of real-time monitoring are analyzed. The relationship of optical path difference of self-interference which occurs in upper and lower surface of workpiece and surface figure of optical element is established. A real-time monitoring method for polishing is proposed and a real-time monitoring system was designed based on a dynamic interferometer and monitoring plate. The stability and repeatability tests of a real-time monitoring system have been conducted and can be applied in surface measurement. Specific application methods for surface measurement of polishing pad is illustrated. The online and offline testing of monitoring plate and workpiece polished simultaneously in same ring are implemented. We can find that the variation trends of the online testing data are consistent with the offline testing data but the numeral deviation. The surface figure variation trend of the monitoring plate and workpiece has been analyzed in terms of peak –valley (PV) and power. The numeral deviation in online and offline testing data is quantitatively analyzed. The surface figure of online self-interference testing and the offline reflection and transmission testing can be in accordance with the proportional relationship after removing influence factors from the friction heat and stress distributions in polishing process, and placement of the workpiece in the measurement. The real-time surface figure monitoring of optical elements could be implemented with the self-interference fringe patterns and wavefront from the upper and lower surface of monitoring plate. Considering the polishing parameters involve size of components and motion trace, the variation trend and value of monitoring plate and the center of large aperture workpiece have no obvious variety regulation. The variation trend and value of monitoring plate is consistent with that of the same size of components and motion trace in large aperture workpiece. The surface figure changes of large aperture workpiece is hardly measured by the small size monitoring plate. With larger aperture beam expander, the laser interference measuring system could be applied in real-time full aperture surface monitoring of optical elements.
语种	中文
内容类型	学位论文
源URL	[http://ir.siom.ac.cn/handle/181231/16897]
专题	上海光学精密机械研究所_学位论文
推荐引用方式 GB/T 7714	陈军. 环抛中抛光胶盘面形在线监控技术研究[D]. 中国科学院上海光学精密机械研究所. 2015.

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