题名长焦距透镜中低频误差检测方法研究
作者金春祥
学位类别硕士
答辩日期2015
授予单位中国科学院上海光学精密机械研究所
导师刘世杰
关键词长焦距透镜 中频误差 数据处理 动态干涉仪 空气相位误差
其他题名Study on measurement of medium and low spatial wavefront error of long focal length lens
中文摘要惯性约束聚变ICF( Interial Confinement Fusion)是一种发展清洁的可再生能源的重要途径,且其对于国防科技也具有极为重要的科学意义。在ICF系统中,磷酸盐钕玻璃、KDP晶体等光学元件上的加工纹理、表面缺陷及灰尘等会产生散射光,在高通量强激光的作用下产生非线性效应,在波面中引入中高频成分,对光学元件造成损伤,因此需要使用空间滤波透镜来抑制系统的中高频成分,改善光束传输质量,提高光学元件的负载和可输出功率。 空间滤波透镜在ICF中起到重要作用,但是由于其长焦距大口径的特性,至今仍未有成熟的透射波前中低频误差的检测方案。本文提出了一种使用载波动态干涉仪的零位补偿法来检测ICF系统中空间滤波透镜的中低频误差。具体工作如下: 设计了长焦距透镜透射波前的中低频误差检测光路。为了验证检测方法的准确性,分别设计了两种基于干涉仪球面标准镜和平面标准镜的检测光路,分别使用不同的干涉仪和及其对应的补偿镜来检测同一片待测长焦距透镜,比较试验结果。 研究波面中频误差处理过程,编写数据处理软件。在数据处理过程中需要在空域加窗函数或者使用Quad-Flip技术来抑制边缘截断引起的Gibbs效应,本文通过理论计算和仿真计算得出了汉宁窗的补偿系数,讨论了在PSD1带通滤波过程中使用软边滤波窗的必要性。 模拟了光路中的加工、装调误差的影响。由于检测光路接近10米,补偿镜的加工装配误差、光路调节误差等会对检测结果产生较大影响。本文在调研实验室现有光学元件的加工、装调精度的基础上,使用光学设计软件Zemax对光路中的单片透镜、镜头的倾斜、偏心、像散等误差进行仿真,得到在现有不同的镜片加工和光路调节精度对于检测结果的低频信息(PV、RMS、GRMS)的影响。另外光路中的加工装调误差引起的波面畸变对检测结果的中频误差(PSD1)产生影响。本文通过仿真得到光路中的倾斜、偏心等误差对于检测波面的PSD1值的影响。 建立锥形干涉腔的空气相位误差模型。由于长焦距透镜检测光路很长,锥形干涉腔中不同位置的空气温度不一样,引起空气的折射率变化,在检测结果中引入了相位误差。本文从空气折射率公式出发建立锥形干涉腔的空气相位误差模型,利用实测的干涉腔的空气温度来计算空气引入的波面误差。 分别设计使用平面标准镜和球面标准镜的检测光路,使用不同的干涉仪来检测同一片透镜,通过实验结果的对比来验证使用动态干涉仪的额零位补偿法检测长焦距透镜的有效性。
英文摘要Inertial Confinement Fusion ICF (Interial Confinement Fusion) is a very promising way to generate clean renewable energy, and also has very important scientific significance for the national defense. In ICF system, manufacture texture and surface defect and dust on phosphate neodymium glass, KDP crystal and optical components will produce scattered light. The nonlinear effect introduced by high flux strong laser will generate middle and high frequency errors in system wavefront and cause damage to optical element. So the spatial filtering lens is necessary to suppress middle and high frequency components in the system, improve the quality of transmitted beam and increase the load and the output power of optical element. Spatial filtering lens plays an important role in the ICF. But because of its characteristics of long focal length and large aperture, the technology to measure the middle spatial frequency error of transmitted wavefront is still far from perfect. This paper proposes a method of nulling testing with dynamic interferometer to detect the space filter lens in middle and low spatial frequency range. Specific work is as follows: Designed nulling lens to measure the middle spatial frequency error of transmitted wavefront of the long focal length lens. In order to verify the accuracy of the test method, two kinds of light path with is designed, based on spherical standard lens and plane standard lens respectively. And then test a long focal length lens with different interferometer and its corresponding nulling compensator. And the two test results are compared to verify the test method. The middle spatial frequency wavefront error processing is researched and corresponding software is written. The window function is necessary in the process of data processing to suppress the cutting edge of Gibbs effect. The compensating coefficients of Hanning window function is calculated by theoretical calculation and simulation. The necessity of using a soft edge in the band-pass filtering for PSD1 is discussed. The influence of errors in the process of manufacture and assembling of lens is simulated. Since the length of optical path is close to 10 meters, processing and assembling error in optical path adjustment will have great influence on test results. B ased on the existing optical element processing and filling accuracy of our laboratory, simulations on astigmatism tilt and decentor errors are carried out with optical design software Zemax. The influence on the low-frequency information (PV and RMS, GRMS) is acquired. Wavefront distortion caused by processing error also has effect on medium frequency wavefront error (PSD1). And the effect is obtained by simulation in this paper. Tapered interference cavity air phase error model is established. Due to the long focal length of spatial filtering lens, the optical path is very long (10m). The air temperature in different location of tapered interference cavity varies, which causes air refractive index is different from place to place. So the introduction of phase error will have effect on the test results. On basis of the air refractive index formula, air cavity phase error model is established, using the measured interference cavity air temperature to calculate the wavefront error introduced by the air. Two different compensating lenses are designed to be used with flat standard lens and spherical standard lens respectively. The validity of null testing long focal length lens with dynamic interferometer is verified by comparing the tested result of a long focal length lens with two different testing optical system.
语种中文
内容类型学位论文
源URL[http://ir.siom.ac.cn/handle/181231/16893]  
专题上海光学精密机械研究所_学位论文
推荐引用方式
GB/T 7714
金春祥. 长焦距透镜中低频误差检测方法研究[D]. 中国科学院上海光学精密机械研究所. 2015.
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