QQ客服 官方微博 反馈留言

题名	2-3微米激光薄膜水吸收特性研究
作者	李豪
学位类别	硕士
答辩日期	2014
授予单位	中国科学院上海光学精密机械研究所
导师	易葵
关键词	2-3μm 中红外光学薄膜 水吸收 吸附 退吸附
其他题名	The properties of moisture absorption in laser films at 2-3μm
中文摘要	23μm波段激光广泛应用于航天遥感，医用设备等领域，此波段的激光薄膜的研发需求也急剧增长。而23μm波段的水吸收系数极高，吸附在薄膜中的微量水汽对此波段激光有明显的吸收，从而影响了激光薄膜元件的整体性能。本文就是在此背景下研究薄膜的水吸收特性。 本文使用23μm波段常用SiO2、Ta2O5、TiO2膜料，使用电子束蒸发技术（EBE）将它们镀制在JGS3、Si和Al2O3基底上。使用带有原位反应池的红外傅立叶光谱仪测量不同温度下的漫反射谱，实时表征薄膜的退吸附过程，从而确定薄膜的水吸收强度和水吸附态变化。 对薄膜进行不同温度的退火处理，测试不同退火温度后薄膜红外透射谱，研究退火处理对水吸收特性的改变。并使用原子力显微镜表征薄膜的表面粗糙度、使用椭偏仪表征薄膜的折射率和厚度、使用X射线光电子能谱仪表征薄膜的晶相变化，研究这些变化与薄膜水吸收特性的联系。 分析原位傅里叶光谱结果发现电子束蒸发的薄膜较为疏松，容易受到基底影响，Si基底上镀制的SiO2和TiO2膜的水吸收强度最大，Al2O3基底和JGS3基底上镀制薄膜的水吸收强度较为接近。通过原子力显微镜分析薄膜表面微结构与水吸收的关系，发现三种薄膜表面孔隙的宽度较为接近，薄膜中水分子吸附就取决于薄膜表面孔隙数目。 分析经退火工艺处理的薄膜发现，退火温度在400℃-600℃可以有效去除薄膜中水吸收的影响。对比退火前，退火后薄膜变得致密，堆积密度变大，有效的去除吸附在薄膜孔隙里面的水汽，有效降低薄膜对水汽的敏感性。
英文摘要	2-3 μm laser applications are rapid developed recently. They are widely applied in the domain of remote sensing, aviation and medical equipment. Therefore, the demand of optical coating increases rapidly. Water absorption is extremely intense in the wavelength of 2-3 μm, causes absorption made by water molecule absorbed in the film, results in the reduction of optical device performance. In the context, it is very important to study water absorption for 2-3μm wavelength optical coating. Infrared materials such as SiO2、Ta2O5、TiO2 as potential film materials are commonly used in the 2-3μm regime. Monolayer thin films were prepared on the substrate of JGS3, Si and Al2O3 by electron beam evaporation (EBE) and magnetron sputtering technique. The intensity of water absorption for the films was measured by in-situ diffuse reflectance infrared Fourier transform spectroscopy (in situ DRIFTS) Films were annealed with different temperature, and then the infrared spectrum was measured. The change of the water absorption in the films, made by the annealing, was discussed. Atomic force microscope was used to test the surface roughness of films. Elliptic partial instrument was applied to characterize the films thickness and the refractive index. And x-ray photoelectron spectrometer was used to measure the change of crystal for the films. The relationship between these changes and property of water absorption was studied. The results of in situ DRIFTS show the films deposited by EBE technique are porosity and effected by substrate easily. Films on Si substrates were confirmed to have the maximum intensity of water absorption. The intensity of water absorption on Si and Al2O3 substrate is close. Micro structures of the films were tested by AFM, resulting that bore diameter on different films is close. The number of porosity on the surface determines the intensity of water absorption. The relationship between micro structure and property of water absorption was discussed. The results of annealing testing found films could have better effect of dehydration with annealing at 400℃,600℃annealed. Films become more densification with lager pack density. The films have lower sensitivity for water molecules.
语种	中文
内容类型	学位论文
源URL	[http://ir.siom.ac.cn/handle/181231/16846]
专题	上海光学精密机械研究所_学位论文
推荐引用方式 GB/T 7714	李豪. 2-3微米激光薄膜水吸收特性研究[D]. 中国科学院上海光学精密机械研究所. 2014.

个性服务

查看访问统计

相关权益政策

暂无数据

收藏/分享

除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。