题名光学元件激光损伤快速检测技术研究
作者范星诺
学位类别硕士
答辩日期2013
授予单位中国科学院上海光学精密机械研究所
导师李学春
关键词激光损伤 线扫描 位相差分 区域分割 损伤提取
其他题名Rapid Detection Technology Research of Laser-induced Damage of Optical Component
中文摘要高功率激光系统中,激光损伤一旦形成,不仅会影响光束质量,而且所引入的光场调制可能会造成后续光学元件的损伤;同时,激光损伤区域在强激光辐照下可能会发生损伤增长,降低了光学元件的使用寿命,增加系统的维护成本。传统的损伤检测技术虽能满足检测需求,但是速度均较慢,无法实现对大口径光学元件的快速检测。因此,迫切需要研究光学元件激光损伤的快速检测技术和装置。 本文致力于研究光学元件激光损伤的快速检测技术和激光损伤提取算法,能在快速获得检测图像的同时,将损伤点准确的从检测图像中提取出来。围绕这两个核心,本文展开了一系列的研究工作: 1.详细分析了激光损伤的形成机理,阐述了激光损伤的危害。在此基础上,讨论了常见的激光损伤检测技术构型和各自的特点。 2.为了明确照明技术对损伤检测的影响,详细分析了三种损伤检测照明技术:明场照明、暗场照明和侧照明技术。阐述了三种照明技术的构型、特点和各自的应用范围。对比了三种照明技术的优缺点。 3.从装置成本、检测速度等方面对比研究了两种能用于大口径光学元件损伤检测的技术方案:面阵CCD检测技术和线扫描检测技术。结果显示,线扫描技术兼具低成本和高检测速度的特点,因此更适宜大口径光学元件激光损伤的快速检测。 4.详细研究了一种适用于光学元件快速检测的技术—线扫描位相差分成像技术,该技术继承了线扫描技术的高速度特点,同时只对能引起位相变化的损伤区域产生响应,因此具有较高的灵敏度。实验研究表明,该技术具有较快的检测速度,能够满足光学元件快速检测的需求;同时,该技术具有超分辨率的分辨能力,且其检测图像具有很高的对比度。 5.阐述了常见的图像分割技术,以区域分割为核心思想,给出了本文的损伤点提取算法流程。并采用Matlab编程语言完成了损伤点自动提取算法的编写,该算法能准确地输出分割结果图和损伤点的数量、位置、大小等信息。
英文摘要In the high-power laser system, once there is laser-induced damage, it will not only affect the quality of the beam, but also its modulated light fields may causedamage of the subsequent optical elements. Meanwhile laser-induced damage area may continue to grow when be exposed to laser radiation, this will reducing the service life of optical components, and increases the maintenance costs of the system.Traditional damage detection techniques are able to meet the testing requirements, but the speed is slow, they cannot achieve rapid detection of large aperture optical components. Therefore, there is an urgent need to study the rapid detection technology and devices of laser-induced damage of optical components. This paper is committed tothe rapid detection technology of laser damage of optical componentand laser damage extraction algorithm, it can acquire detection image fast and extract damage points from the imageaccurately. Around the two points, this paper launches a series of research work: 1.We analyze the formation mechanism and thehazardsof the laser-induced damagein details.Based on this, we discussthe configurations of the common laser damage detection technologies, and their respective characteristics. 2.In order to clarify the impact of illumination technology for damage detection, we analyze three damage detection illumination technologies: bright-field illumination, dark field illumination and side illumination technology. We analyze their configurations, features, and the respective applications, meanwhilecompare the advantages and disadvantages of the three illumination technology. 3. From the cost of the device and the detection speed, we compare two technical solutions which can be used for large-aperture optics damage detection, they arematrix CCD detector technology and line scan detection technology. The results show that the line scan technology combines the characteristics of low cost and high detection speed;therefore it’s more suitable for rapid detection of laser-induced damageof large aperture optics. 4.Study a rapid detection technology for optical elements—line scan phase differential imaging technology, this technique inherits high speed of line scan technology, meanwhile it only response to a phase change, therefore it has high sensitivity.Experimental studies show that this technique has fast detection speed, it is possible to satisfy the demand for rapid detection of the optical element; at the same time, this technique has the super-resolutioncapability, and its detected image having a high contrast. 5.Describes the common image segmentation technologies, give the damage point extraction algorithm flow based on Region segmentation.And finish the automatic extraction algorithm program with Matlab language, the program can accurately output segmentation image and the information of damage including amount, location and size.
语种中文
内容类型学位论文
源URL[http://ir.siom.ac.cn/handle/181231/16761]  
专题上海光学精密机械研究所_学位论文
推荐引用方式
GB/T 7714
范星诺. 光学元件激光损伤快速检测技术研究[D]. 中国科学院上海光学精密机械研究所. 2013.
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