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题名	金属介质组合宽带反射式相位延迟膜设计与制备
作者	李星
学位类别	硕士
答辩日期	2011
授予单位	中国科学院上海光学精密机械研究所
导师	黄建兵
关键词	宽带相位延迟 G-T腔 金属-介质膜 自补偿
其他题名	Design and Preparation of Metal-Dielectric multilayers achieving Broadband and high Reflectance Phase Retardation
中文摘要	在可见光和红外波段，金属介质组合薄膜相位延迟器兼具金属膜的宽光谱、高反射特性、稳定相位延迟和介质膜吸收小的特性，利用较少的介质膜层数和一层金属膜实现高反和270º相位延迟。 本文以金属-介质组合薄膜相位延迟器的设计与制备为主线，从理论设计到膜系制备与应用，对金属-介质组合薄膜相位延迟器逐层深入研究，主要内容包括以下三部分： 在入射角45º，波段Δλ=1000~1100nm内，利用Ag膜的高反射率和稳定的相位延迟特性，首次引入(Gires-Tournois）G-T腔调节相位，设计金属介质组合宽带反射式270º相位延迟膜，。分别以两组材料设计： （1）Ag/Al2O3/TiO2/SiO2：入射角45º，设计波段Δλ=1000~1100nm内，获得反射率R≥99.95%，平均反射率 =99.98%，相位延迟269.2º≤Δ≤270.8º，平均相位延迟 =270.1º，同时利用Al2O3层增强Ag与基底以及Ag与介质层的粘附性，并分析了物理厚度、折射率、入射角以及敏感层对光谱性能的影响。 （2）Ag/Al2O3/HfO2/SiO2：入射角45º，设计波段Δλ=1030~1100nm内，获得反射率：R>98.4%，相位延迟：263.3º<Δ<270.8º。 制备Ag/Al2O3/HfO2/SiO2膜系，分析不同膜系段对反射率和相位延迟影响，将其分成高反膜系和相位延迟膜系两部分制备。在设计带宽1030~1100nm内，实现反射率R>95.7%，平均相位延迟为277º±6.7º，其中在1064nm处实现反射率R>98%，相位延迟为271º±2º。对制备结果分析拟合，拟合结果与测量值的重复性较好。在入射角为45º时，获得损伤阈值（LIDT）为3.8J/cm2（1064nm，12ns）。空气中放置四个月后，样品的反射率和相位延迟没有明显变化。 根据金属介质组合宽带反射式相位延迟膜的设计结果和相位特性，设计可调宽带相位自补偿延迟器，按照使用需要，通过调节不同的入射角实现相位自补偿延迟或者一定相位延迟范围内单调变化，并给出三种应用实例。
英文摘要	Metal-dielectric multilayer coating contains the optical properties of the metal and dielectric layer in the visible and infrared band. High reflectance and 270°phase retardation were obtained with fewer dielectric layers and single metal layer. This thesis was focused on the design and preparation of metal-dielectric multilayer phase retarder. The research was carried on step by step from theory design to preparation and application, mainly including three parts as follows: The silver film with high reflectance and excellent phase characteristic was used as metal layer. The G-T cavity (Gires–Tournois) was introduced into this design for the first time to adjust 270ºphase shift in the wavelength range 1000~1100nm at 45º.Two groups of materials were used separately to design as follows. (1)According to the design ideas, phase retarder was designed with Ag/Al2O3/TiO2/SiO2 by optimizing dielectric layers in the wavelength range 1000~1100nm at 45º.Reflectance R≥99.95% and average reflectance =99.98% is achieved .Phase shift 269.2º≤Δ≤270.8ºand average phase shift =270.1ºis also obtained. Al2O3 layer was put into use to enhance the adhesion between Ag layer and dielectric layer as well as between Ag layer and substrate. Furthermore, The influence of optical characters caused by physical thickness, refractive index, incident angle and sensitive layer were also analyzed. (2)With the same ideas, phase retarder was designed with Ag/Al2O3/HfO2/SiO2 by optimizing dielectric layers in the wavelength range 1030~1100nm at 45º. Reflectance R≥98.4% and phase shift 263.3º＜Δ＜270.8ºis achieved . The second design was divided into two parts as high reflective film and phase coating to prepare. The influence of optical characters caused by each of the two parts were analyzed. Reflectance R>95.7% and average phase shift 277º±6.7ºis achieved in the design wavelength band1030~1100nm at 45º.Clearly seen，reflectance R>98% and phase shift 271º±2ºwas obtained in the 1064nm at 45º.The fitting curve is in coincident with the measurement results well. The laser induced damage threshold(LIDT) of 3.8J/cm2(1064nm,12ns) is gained at 45º.After exposure to the air for four months, the reflectance and phase shift remained stable. Based on the design results and phase character of the metal-dielectric phase retarder, a broadband and adjustable phase retarder with self-compensation is designed. The incident angles are adjusted to gain self-compensation in phase shift or monotonous variation within a certain range of phase shift. Three examples were given to explain them.
语种	中文
内容类型	学位论文
源URL	[http://ir.siom.ac.cn/handle/181231/16697]
专题	上海光学精密机械研究所_学位论文
推荐引用方式 GB/T 7714	李星. 金属介质组合宽带反射式相位延迟膜设计与制备[D]. 中国科学院上海光学精密机械研究所. 2011.

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