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题名	椭偏技术在波片测量中的应用研究
作者	缪洁
学位类别	硕士
答辩日期	2008
授予单位	中国科学院上海光学精密机械研究所
导师	朱健强
关键词	椭偏测量 相位延迟 四区域法 波片 元件缺陷
其他题名	Application Research on Ellipsometry in Measuring Phase Retardation of Wave Plates
中文摘要	椭圆偏振测量技术的本质是测量光束从被测材料反射或者透射前后偏振状态的改变。这种偏振状态的变化量通过幅值比 和相位差 来表示，这两个测得的椭偏参数与被测材料的光学性质和厚度有关。因此，椭偏测量技术主要用于测量薄膜的厚度与光学常数。然而这个技术也被应用于测量材料结构、晶体、表面粗糙度、掺杂浓度以及其他与椭偏参数相关的材料性质。 波片（或相位延迟器）利用晶体的双折射来改变光的偏振态，所以它是近来椭偏测量技术中最为常用的光学器件之一。无论波片在椭偏测量技术中还是其他现代光学技术的应用中，为了保证系统的运行和精度，波片的精确标定都是不可或缺的。 波片测量的基本思想是，偏振单色光通过波片后，由于相位延迟的作用，使光的偏振态发生变化，运用检偏器分析通过被测波片后的光的偏振状态，通过光电接受装置测量出光的强度，采用适当的算法，就能测量出波片的相位延迟量。测量中，作为起偏器和检偏器的偏振器件的消光系数对于测量结果有较大的影响。如何消除偏振器件不完美造成的影响是进一步提高波片标定的关键。 本论文提出了在原测量系统基础上提出一种四区域测量波片相位延迟量的方法。完全消除了起偏器和检偏器不完全消光带来的误差，结构和计算方法都较为简单。由于测量系统中不存在标准波片或其他相位调制元件，允许测量波长仅受到偏振棱镜和探测器的限制（一般可以达到300nm～1200nm），因此可以适用于很大波长范围内任意波长的波片测量。以 波片为例，理论分析了该系统利用四区域测量法后的仪器误差为 （约0.2°），精度比原算法提高约1个数量级。最后，通过实验证明该方法确实能够提高系统精度。
英文摘要	Ellipsometry measured a change in polarization as light reflected or transmitted from a material structure. The polarization change was represented as an amplitude ratio Ψ, and the phase difference Δ. The measured ellipsometric parameters depended on optical properties and thickness of individual materials. Thus, ellipsometry was primarily used to determine film thickness and optical constants. However, it was also applied to characterize composition, crystallinity, roughness, doping concentration, and other material properties associated with a change in ellipsometric parameters. The wave plate (or retardation plate) has been one of the most frequently used optical components in ellipsometry systems recently, because it can adjust the state of polarization by using the birefringence feature of a crystal. Among the different applications of wave plates in ellipsometry and other modern optics, a precise wave plate is indispensable to ensure the success of operations. The general principle of the wave plate measurement was that the state of polarization of light changed when it passed through the wave plate due to phase retardation. The change could be determined by a polariscope used as an analyzer. In other words, the phase retardation of the tested wave plate could be figured out from the density of light received by detectors. In the survey, extinction coefficient of polarizer and analyzer had the tremendous influence on measurement precision. How to eliminate the influence from the polarization components’ drawbacks would be the key in further enhancement of the wave plate demarcation. My present work is to put forward a novel method based on the Polarizer-Wave plate-Analyzer system to measure the phase retardation of wave plates，which is named as Four-Zone method. It eliminates the error caused by polarizer and analyzer imperfections completely in phase retardation measuring. The set up and calculation of the method are both very simple and no standard wave plate or other phase modulation instruments are involved in the system. The measurement wavelength range (generally 300nm~1200nm) is much wider, because it is only related to the polarizing prisms and detectors. Therefore, the Four-Zone method can be used in measuring any wave plate of wide wavelength range. The uncertainty of the measurement system is theoretically analyzed and the result is less than (about 0.2°). The accuracy is increased by one or two order with this method. The method is also proved very precise by the experiment.
语种	中文
内容类型	学位论文
源URL	[http://ir.siom.ac.cn/handle/181231/16401]
专题	上海光学精密机械研究所_学位论文
推荐引用方式 GB/T 7714	缪洁. 椭偏技术在波片测量中的应用研究[D]. 中国科学院上海光学精密机械研究所. 2008.

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