QQ客服 官方微博 反馈留言

题名	半导体激光正弦相位调制实时干涉测量技术的研究
作者	李代林
学位类别	博士
答辩日期	2004
授予单位	中国科学院上海光学精密机械研究所
导师	王向朝
关键词	干涉仪 正弦相位调制 实时测量
其他题名	Study on real-time laser diode sinusoidal phase-modulating interferometry
中文摘要	半导体激光正弦相位调制干涉测量技术是目前国际前沿的高精度光学测量技术，具有精度高、结构简单及非接触等特点，可以实现动态干涉，在光学生物传感、微电子机械系统加工与应用、自动控制、环境检测、纳米精度位移测量和传感等领域有着广泛的应用前景。本论文基于半导体激光正弦相位调制干涉测量技术，提出了几种用于物体位移、振动和物体厚度实时测量方法。本论文的主要创新之处有：1．提出了复合光源实时位移测量技术。采用由两个半导体激光器组成的复合光源，利用半导体激光器的光热效应，消除了半导体激光器正弦相位调制干涉仪中由电流调制所带来的测量误差，同时通过反馈系统，有效地减小外界干扰所带来的影响，信号处理系统由电路组成，能够实时完成对干涉信号的处理，实现了物体微振动的纳米精度实时测量。2．提出了较大量程的微振动纳米精度实时干涉测量技术。利用实时鉴相和实时phase-unwraPping技术，实现了物体位移的亚纳米分辨率较大量程实时测量。3．提出了用于距离实时测量的双正弦相位调制干涉测量技术。该干涉仪同时改变半导体激光器的波长和干涉仪的光程差实现对干涉信号的双正弦相位调制。采用贝塞尔函数比值法消除了调制光源波长引起的光强波动对测量结果的影响，提高了干涉仪的测量精度并扩大了测量范围。4．提出了用于平行平板厚度测量的双调制半导体激光干涉技术，实现了对透明平板厚度的实时高精度测量。5．提出了基于人工神经网络的大量程光纤实时距离干涉测量仪。为了扩大测量仪的测量范围和消除输出信号中的交叉敏感影响，采用人工神经网络进行信号处理，先把两路经过初步解调的干涉信号作为输入样本，物体距离的实际值作为输出样本，对神经网络进行训练，以使其具有良好的推广能力。然后应用人工神经网络对物体距离实现大量程测量。文中对这五种测量系统的原理、实验装置的进行了描述，并给出了相应的实验结果。
英文摘要	Laser diode sinusoidal phase-modulating (LD-SPM) interferometry is an advancing front method for high-precision optical measurements. It has many advantages: high accuracy, high sensitivity, simplicity in construction, non-contact and so on. The dynamic interference can be implemented easily with it. It is widely used in many fields, such as autocontrok optical biosensors environmental detection and displacement measurements with nanometer-precision. Based on LD-SPM interferometry, several novel interferometers for real-time measurements of minute vibration % displacement and thickness with a high resolution are proposed in this paper. 1. A novel LD-SPM interferometer is proposed. It can be used to measure micro-vibrations with a high accuracy in real time. A composite light source consists of two laser diodes. It is employed to decrease the measurement errors caused by the light-intensity changes. The experimental results make it clear that it is insensitive to external disturbances and intensity fluctuations of the light source. 2. A LD-SPM interferometer for wide-range displacement measurements in real-time is proposed. A real-time phase detector is constructed with Single Chip Micyoco to enlarge the measurement range. 3.An optical interferometer for measuring the distance in real time is presented. The optical phase of the interferometer is simultaneously modulated with a frequency modulated laser diode and optical path-length difference. By combining a phase demodulation technique with a Bessel function-ratio method, the error signal originating from the fluctuation of the light-intensity caused by the modulation current can be decreased greatly. 4.A double SPM laser diode interferometer for thickness measurements of a transparent plate is presented. A carrier signal is given to the interference signal by using a PZT, and the SPM interferometry is applied to measure the thickness of a transparent plate. A signal processing system consisting of a discrimination circuit and a low pass filter is used to demodulate the interferometric signal in real time. 5. A novel optic fiber interferometer for distance measurements over a wide measurement range using an artificial neural network is designed. The distance is measured with a frequency-modulated and path-length modulated interferometer. To enlarge the measurement range and eliminate the influence of the cross-sensitivity, the interferometer readings are used as input data and the actual sensed measuring value as desired output data during the training process of the network model. The basic principles and signal processing systems of the above five measuring systems are described, and the corresponding experimental results are also given.
语种	中文
内容类型	学位论文
源URL	[http://ir.siom.ac.cn/handle/181231/15524]
专题	上海光学精密机械研究所_学位论文
推荐引用方式 GB/T 7714	李代林. 半导体激光正弦相位调制实时干涉测量技术的研究[D]. 中国科学院上海光学精密机械研究所. 2004.

个性服务

查看访问统计

相关权益政策

暂无数据

收藏/分享

除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。