| 题名 | 光学薄膜的长脉冲损伤机制及其测试研究 |
| 作者 | 李大伟 |
| 学位类别 | 博士 |
| 答辩日期 | 2008 |
| 授予单位 | 中国科学院上海光学精密机械研究所 |
| 导师 | 邵建达 |
| 关键词 | 光学薄膜 激光损伤 损伤阈值 激光预处理 多波长激光损伤 |
| 其他题名 | Long pulse laser induced damage mechanisms and threshold testing of optical coatings |
| 中文摘要 | 光学薄膜是激光系统中的重要元件，其在激光辐照下的表现直接影响激光系统的性能与稳定。本文针对长脉冲激光与光学薄膜的相互作用，结合实验现象与理论模型，研究了不同类型的光学薄膜元件的损伤行为，并进行了激光损伤阈值提升技术的探索。具体来说有几个方面： 分析了缺陷诱导光学薄膜损伤的几率性特点及损伤几率的变化规律，提出了指数拟合法用以拟合损伤几率数据，获取较为准确的损伤阈值，并还分析了部分实验参数对测量结果的影响。 基于功能性损伤定义，分析了长脉冲基频激光辐照下，膜层温升与界面结构的耦合在分层剥落产生过程中的作用，并通过损伤实验进行了间接验证、对剥落抑制手段进行了探索；研究了重复率激光脉冲作用下光学薄膜的损伤发展。 通过电子束蒸发制备了HfO2/SiO2三倍频分离膜并分别采用基频激光及二倍频激光进行了损伤实验，并对损伤特性、损伤机制进行了分析；另外本文还就其二倍频激光预处理效果进行了研究。 考察了激光输出脉冲的统计特性，通过计算模拟研究了小光斑扫描预处理过程中的激光脉冲能量波动及脉冲定位误差对预处理效率的影响；设计并建立了小光斑扫描预处理平台。 |
| 英文摘要 | Optical coatings are important components of laser systems, and their performance during laser pulse irradiation determines the capability of laser systems. So it is important to study the damage of optical coating components for laser systems development. In this thesis, we have studied the laser induced damage behavior of some optical coating components based on the experimental data and existing damage mechanisms, and we have also done some work in laser induced damage mechanism and laser induced damage threshold enhancement. The content of the paper covers the laser induced damage threshold test, long pulse laser induced damage mechanism and laser resistance enhancement, as decrypted in followings: The damage probability induced by defects under long pulse laser irradiation was studied, and a new fitting model, exponential fitting model, was put forward to extrapolate the damage data. The effect of irradiating spot size and mumber of sites exposed for each pulse energy density on damage probability was studied. The contribution of interfaces between coating layers during the delamination under irradiation was analyzed based on the functional-damage-threshold, and it was validated by several damage experiments indirectly. The growth of optical coatings damage under multi-shot laser was studied. The damage behavior of HfO2/SiO2 third harmonic seporator fabricated by E-beam evaporate under irradiation of 1w and 2w laser was studied, and the damage mechanism was analyzed. Also the laser resistance enhancement after 0.532nm laser conditioning was investigated. The efficiency of laser raster scanning of optics with pulse energy and pointing fluctuations was investigated by computer simulation, and the conditioning process was optimized. A laser raster scanning condition platform was established according to the results above. |
| 语种 | 中文 |
| 内容类型 | 学位论文 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/15245]  |
| 专题 | 上海光学精密机械研究所_学位论文 |
| 推荐引用方式 GB/T 7714 | 李大伟. 光学薄膜的长脉冲损伤机制及其测试研究[D]. 中国科学院上海光学精密机械研究所. 2008. |
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