In situ aberration measurement technique based on an aerial image with an optimized source

CORC > 上海光学精密机械研究所 > 中国科学院上海光学精密机械研究所 > 信息光学与光电技术实验室

	In situ aberration measurement technique based on an aerial image with an optimized source
	Yan, Guanyong ; Wang, Xiangzhao ; Li, Sikun ; Yang, Jishuo ; Xu, Dongbo ; Duan, Lifeng ; Bourov, Anatoly Y.; Erdmann, Andreas
刊名	opt. eng.
	2013
卷号	52 期号:6 页码:63602
通讯作者	yan, gy (reprint author), chinese acad sci, lab informat opt & optoelect technol, shanghai inst opt & fine mech, shanghai 201800, peoples r china.
英文摘要	an in situ aberration measurement technique based on an aerial image with an optimized source is proposed. a linear relationship between the aerial image and zernike coefficients is established by the principal components and regression matrices, which are obtained in a modeling process through principal component analysis (pca) and regression analysis. the linear relationship is used to extract zernike aberrations from the measured aerial image in a retrieval process. the characteristics of regression matrix are analyzed, and the retrieval process of zernike coefficients is optimized. an evaluation function for the measurement accuracy of zernike aberrations is proposed, and then a fast procedure to optimize the illumination source is designed. parameters of the illumination source are optimized according to the evaluation function and applied in our method. the simulators dr. litho and prolith are used to validate the method. compared to the previous aberration measurement technique based on principal component analysis of an aerial image (amai-pca), the number terms of zernike coefficients that can be measured are increased from 7 to 27, and the measurement accuracy of zernike aberrations is improved by more than 20%. (c) 2013 society of photo-optical instrumentation engineers (spie)
收录类别	SCI
语种	英语
内容类型	期刊论文
版本	出版稿
源URL	[http://ir.siom.ac.cn/handle/181231/14730]
专题	上海光学精密机械研究所_信息光学与光电技术实验室
作者单位	1.[Yan, Guanyong 2.Wang, Xiangzhao 3.Li, Sikun 4.Yang, Jishuo 5.Xu, Dongbo] Chinese Acad Sci, Lab Informat Opt & Optoelect Technol, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China 6.[Yan, Guanyong 7.Yang, Jishuo] Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China 8.[Duan, Lifeng 9.Bourov, Anatoly Y.] Shanghai Micro Elect Equipment Co Ltd, Shanghai 201203, Peoples R China 10.[Erdmann, Andreas] Fraunhofer Inst Integrated Syst & Device Technol, D-91058 Erlangen, Germany
推荐引用方式 GB/T 7714	Yan, Guanyong,Wang, Xiangzhao,Li, Sikun,et al. In situ aberration measurement technique based on an aerial image with an optimized source[J]. opt. eng.,2013,52(6):63602.
APA	Yan, Guanyong.,Wang, Xiangzhao.,Li, Sikun.,Yang, Jishuo.,Xu, Dongbo.,...&Erdmann, Andreas.(2013).In situ aberration measurement technique based on an aerial image with an optimized source.opt. eng.,52(6),63602.
MLA	Yan, Guanyong,et al."In situ aberration measurement technique based on an aerial image with an optimized source".opt. eng. 52.6(2013):63602.