Ronchi相移剪切干涉仪及其相位提取误差分析

CORC > 上海光学精密机械研究所 > 中国科学院上海光学精密机械研究所 > 信息光学与光电技术实验室

	Ronchi相移剪切干涉仪及其相位提取误差分析
	吴飞斌 ; 唐锋 ; 王向朝 ; 李杰 ; 李永
刊名	光学学报
	2015
卷号	35 期号:6 页码:612004
其他题名	Phase Retrieval Errors Analysis of Ronchi Phase-Shifting Shearing Interferometer
通讯作者	Wu Feibin, Lab oratory of Information Optics and Opto-Electronic Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China. ; Tang Feng, Lab oratory of Information Optics and Opto-Electronic Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China. ; Wang Xiangzhao, Lab oratory of Information Optics and Opto-Electronic Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China. ; Li Jie, Lab oratory of Information Optics and Opto-Electronic Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China. ; Li Yong, Lab oratory of Information Optics and Opto-Electronic Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China.
中文摘要	在分析Ronchi相移剪切干涉仪典型系统参数的基础上,系统研究了该干涉仪相位提取精度的主要影响因素。结合传统的五步相移算法,采用所提出的八步与十步相移算法,对Ronchi相移剪切干涉仪的相位提取误差进行理论分析和仿真计算。仿真结果说明,八步和十步相移算法可以有效地消除多级衍射光寄生干涉对相位提取精度的影响,且十步相移算法比八步相移算法具有更高的相位提取精度;为了提高测量精度,要求相移误差优于2%;探测器位数大于10位;光栅周期误差小于1%;光源空间相干性低于0.1。通过采用不同的相移算法、剪切率和光源空间相干性的三组对比实验,对理论分析的正确性进行了验证。
英文摘要	Based on analysis of the typical system parameters of Ronchi phase shifting shearing interferometer, the main phase retrieval error sources of the interferometer are systematically studied. Combined with the traditional five-frame algorithm, retrieval phase errors of Ronchi phase-shifting shearing interferometer are analyzed and simulated with the self-designed eight-frame and ten-frame phase-shifting algorithm. The simulation results show that the ten-frame phase-shifting algorithm has a better phase retrieval accuracy than the eight-frame phase-shifting algorithm and both the two algorithms can effectively eliminate negative effects of unwanted interference from the high order diffraction light, which limits the phase retrieval accuracy. In order to improve the measurement accuracy, the following conditions should be satisfied: the phase shifting error is better than 2%, at least 10-bit quantization detector is used, the grating period error is less than 1% and the spatial coherence of light is less than 0.1. The theoretical analysis is validated by three groups of comparison experiments with different phase retrieval algorithms, shear ratios and spatial coherence of light.
收录类别	EI
原文出处	http://www.opticsjournal.net
语种	中文
内容类型	期刊论文
版本	出版稿
源URL	[http://ir.siom.ac.cn/handle/181231/14172]
专题	上海光学精密机械研究所_信息光学与光电技术实验室
作者单位	1.吴飞斌, 中国科学院上海光学精密机械研究所, 中科院信息光学与光电技术实验室, 上海 201800, 中国. 2.唐锋, 中国科学院上海光学精密机械研究所, 中科院信息光学与光电技术实验室, 上海 201800, 中国. 3.王向朝, 中国科学院上海光学精密机械研究所, 中科院信息光学与光电技术实验室, 上海 201800, 中国. 4.李杰, 中国科学院上海光学精密机械研究所, 中科院信息光学与光电技术实验室, 上海 201800, 中国. 5.李永, 中国科学院上海光学精密机械研究所, 中科院信息光学与光电技术实验室, 上海 201800, 中国.
推荐引用方式 GB/T 7714	吴飞斌,唐锋,王向朝,等. Ronchi相移剪切干涉仪及其相位提取误差分析[J]. 光学学报,2015,35(6):612004.
APA	吴飞斌,唐锋,王向朝,李杰,&李永.(2015).Ronchi相移剪切干涉仪及其相位提取误差分析.光学学报,35(6),612004.
MLA	吴飞斌,et al."Ronchi相移剪切干涉仪及其相位提取误差分析".光学学报 35.6(2015):612004.