Femtosecond laser 3D nanofabrication in glass: enabling direct write of integrated micro/nanofluidic chips

CORC > 上海光学精密机械研究所 > 中国科学院上海光学精密机械研究所 > 强场激光物理国家重点实验室

	Femtosecond laser 3D nanofabrication in glass: enabling direct write of integrated micro/nanofluidic chips
	Cheng, Ya ; Liao, Yang ; Sugioka, Koji
	2014
会议名称	conference on laser applications in microelectronic and optoelectronic manufacturing (lamom) xix
通讯作者	cheng, y (reprint author), chinese acad sci, shanghai inst opt & fine mech, state key lab high field laser phys, pob 800-211, shanghai 201800, peoples r china.
英文摘要	the creation of complex three-dimensional (3d) fluidic systems composed of hollow micro-and nanostructures embedded in transparent substrates has attracted significant attention from both scientific and applied research communities. however, it is by now still a formidable challenge to build 3d micro-and nanofluidic structures with arbitrary configurations using conventional planar lithographic fabrication methods. as a direct and maskless fabrication technique, femtosecond laser micromachining provides a straightforward approach for high-precision spatial-selective modification inside transparent materials through nonlinear optical absorption. here, we demonstrate rapid fabrication of high-aspect-ratio micro-and/or nanofluidic structures with various 3d configurations in glass substrates by femtosecond laser direct writing. based on this approach, we demonstrate several functional micro-and nanofluidic devices including a 3d passive microfluidic mixer, a capillary electrophoresis (ce) analysis chip, and an integrated micro-nanofluidic system for single dna analysis. this technology offers new opportunities to develop novel 3d micro-nanofluidic systems for a variety of lab-on-a-chip applications.
会议录	laser applications in microelectronic and optoelectronic manufacturing (lamom) xix
会议录出版者	spie-int soc optical engineering
语种	英语
内容类型	会议论文
源URL	[http://ir.siom.ac.cn/handle/181231/17215]
专题	上海光学精密机械研究所_强场激光物理国家重点实验室
作者单位	1.[Cheng, Ya 2.Liao, Yang] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, State Key Lab High Field Laser Phys, Shanghai 201800, Peoples R China
推荐引用方式 GB/T 7714	Cheng, Ya,Liao, Yang,Sugioka, Koji. Femtosecond laser 3D nanofabrication in glass: enabling direct write of integrated micro/nanofluidic chips[C]. 见:conference on laser applications in microelectronic and optoelectronic manufacturing (lamom) xix.