Femtosecond laser three-dimensional micro- and nanofabrication

CORC > 上海光学精密机械研究所 > 中国科学院上海光学精密机械研究所 > 强场激光物理国家重点实验室

	Femtosecond laser three-dimensional micro- and nanofabrication
	Sugioka, Koji ; Cheng, Ya
刊名	appl. phys. rev.
	2014
卷号	1 期号:4 页码:41303
关键词	SYMMETRIC WAVE-GUIDES OPTICALLY TRANSPARENT MATERIALS BAND-GAP MATERIALS ON-A-CHIP 2-PHOTON PHOTOPOLYMERIZATION PHOTOSENSITIVE GLASS REPETITION-RATE MICROFLUIDIC CHANNEL HEAT ACCUMULATION DIRECTLY WRITTEN
通讯作者	sugioka, k (reprint author), riken, ctr adv photon, hirosawa 2-1, wako, saitama 3510198, japan.
英文摘要	the rapid development of the femtosecond laser has revolutionized materials processing due to its unique characteristics of ultrashort pulse width and extremely high peak intensity. the short pulse width suppresses the formation of a heat-affected zone, which is vital for ultrahigh precision fabrication, whereas the high peak intensity allows nonlinear interactions such as multiphoton absorption and tunneling ionization to be induced in transparent materials, which provides versatility in terms of the materials that can be processed. more interestingly, irradiation with tightly focused femtosecond laser pulses inside transparent materials makes three-dimensional (3d) micro- and nanofabrication available due to efficient confinement of the nonlinear interactions within the focal volume. additive manufacturing (stereolithography) based on multiphoton absorption (two-photon polymerization) enables the fabrication of 3d polymer micro- and nanostructures for photonic devices, micro- and nanomachines, and microfluidic devices, and has applications for biomedical and tissue engineering. subtractive manufacturing based on internal modification and fabrication can realize the direct fabrication of 3d microfluidics, micromechanics, microelectronics, and photonic microcomponents in glass. these microcomponents can be easily integrated in a single glass microchip by a simple procedure using a femtosecond laser to realize more functional microdevices, such as optofluidics and integrated photonic microdevices. the highly localized multiphoton absorption of a tightly focused femtosecond laser in glass can also induce strong absorption only at the interface of two closely stacked glass substrates. consequently, glass bonding can be performed based on fusion welding with femtosecond laser irradiation, which provides the potential for applications in electronics, optics, microelectromechanical systems, medical devices, microfluidic devices, and small satellites. this review paper describes the concepts and principles of femtosecond laser 3d micro- and nanofabrication and presents a comprehensive review on the state-of-the-art, applications, and the future prospects of this technology. (c) 2014 author(s).
收录类别	SCI
语种	英语
内容类型	期刊论文
版本	出版稿
源URL	[http://ir.siom.ac.cn/handle/181231/13583]
专题	上海光学精密机械研究所_强场激光物理国家重点实验室
作者单位	1.[Sugioka, Koji] RIKEN, Ctr Adv Photon, Wako, Saitama 3510198, Japan 2.[Cheng, Ya] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China
推荐引用方式 GB/T 7714	Sugioka, Koji,Cheng, Ya. Femtosecond laser three-dimensional micro- and nanofabrication[J]. appl. phys. rev.,2014,1(4):41303.
APA	Sugioka, Koji,&Cheng, Ya.(2014).Femtosecond laser three-dimensional micro- and nanofabrication.appl. phys. rev.,1(4),41303.
MLA	Sugioka, Koji,et al."Femtosecond laser three-dimensional micro- and nanofabrication".appl. phys. rev. 1.4(2014):41303.