Femtosecond Laser 3D Fabrication in Porous Glass for Micro- and Nanofluidic Applications

CORC > 上海光学精密机械研究所 > 中国科学院上海光学精密机械研究所 > 强场激光物理国家重点实验室

	Femtosecond Laser 3D Fabrication in Porous Glass for Micro- and Nanofluidic Applications
	Liao, Yang ; Cheng, Ya
刊名	micromachines
	2014
卷号	5 期号:4 页码:1106
关键词	femtosecond laser 3D fabrication microfluidics nanofluidics porous glass
通讯作者	cheng, y (reprint author), chinese acad sci, shanghai inst opt & fine mech, state key lab high field laser phys, pob 800-211, shanghai 201800, peoples r china.
英文摘要	the creation of complex three-dimensional (3d) fluidic systems composed of hollow micro- and nanostructures embedded in transparent substrates has attracted significant attention from both scientific and applied research communities. however, it is by now still a formidable challenge to build 3d micro- and nanofluidic structures with arbitrary configurations using conventional planar lithographic fabrication methods. as a direct and maskless fabrication technique, femtosecond laser micromachining provides a straightforward approach for high-precision, spatially-selective, modification inside transparent materials through nonlinear optical absorption. in this paper, we demonstrate rapid fabrication of high-aspect-ratio micro- and/or nanofluidic structures with various 3d configurations by femtosecond laser direct writing in porous glass substrates. based on this approach, we demonstrate several functional micro- and nanofluidic devices including a 3d passive microfluidic mixer, a capillary electrophoresis (ce) analysis chip, and an integrated micro-nanofluidic system for single dna analysis. the possible mechanisms behind the formation of high-aspect-ratio micro- and nanochannels are also discussed. this technology offers new opportunities to develop novel 3d micro-nanofluidic systems for a variety of lab-on-a-chip applications.
收录类别	SCI
语种	英语
内容类型	期刊论文
版本	出版稿
源URL	[http://ir.siom.ac.cn/handle/181231/13179]
专题	上海光学精密机械研究所_强场激光物理国家重点实验室
作者单位	1.[Liao, Yang 2.Cheng, Ya] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, State Key Lab High Field Laser Phys, Shanghai 201800, Peoples R China
推荐引用方式 GB/T 7714	Liao, Yang,Cheng, Ya. Femtosecond Laser 3D Fabrication in Porous Glass for Micro- and Nanofluidic Applications[J]. micromachines,2014,5(4):1106.
APA	Liao, Yang,&Cheng, Ya.(2014).Femtosecond Laser 3D Fabrication in Porous Glass for Micro- and Nanofluidic Applications.micromachines,5(4),1106.
MLA	Liao, Yang,et al."Femtosecond Laser 3D Fabrication in Porous Glass for Micro- and Nanofluidic Applications".micromachines 5.4(2014):1106.