Study of thin-film SO2 gas sensors by photometric and ellipsometric methods

CORC > 上海光学精密机械研究所 > 中国科学院上海光学精密机械研究所 > 光学薄膜技术研究与发展中心

	Study of thin-film SO2 gas sensors by photometric and ellipsometric methods
	Tang, ZS; Fan, ZX; Shao, JD
刊名	opt. eng.
	2001
卷号	40 期号:5 页码:856
通讯作者	tang, zs, chinese acad sci, shanghai inst opt & fine mech, pob 800-211, shanghai 201800, peoples r china
英文摘要	pt-, pd-, and zr-doped sno2 thin films and dopant-free vox films were fabricated by planar magnetron sputtering. tests for sensitivity to so2 for all samples were conducted at 180 degreesc, and the sensitivities were investigated ex situ with photometric and ellipsometric methods at room temperature. it was found that the optical sensitivities as well as the sensitive wavelength region for sno2 films could be tuned by doping. the pd-doped sno2 films had good sensitivity in the visible range, and the zr-doped in the near ir. the dominant sensitive wavelength region for vox films fell into the visible range, and the ratio of the sensitivity in the visible to that in the near ir increased with o-2/ar in the depositing atmosphere. (c) 2001 society of photo-optical instrumentation engineers .
收录类别	SCI
语种	英语
内容类型	期刊论文
版本	出版稿
源URL	[http://ir.siom.ac.cn/handle/181231/17315]
专题	上海光学精密机械研究所_光学薄膜技术研究与发展中心
作者单位	Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China
推荐引用方式 GB/T 7714	Tang, ZS,Fan, ZX,Shao, JD. Study of thin-film SO2 gas sensors by photometric and ellipsometric methods[J]. opt. eng.,2001,40(5):856.
APA	Tang, ZS,Fan, ZX,&Shao, JD.(2001).Study of thin-film SO2 gas sensors by photometric and ellipsometric methods.opt. eng.,40(5),856.
MLA	Tang, ZS,et al."Study of thin-film SO2 gas sensors by photometric and ellipsometric methods".opt. eng. 40.5(2001):856.