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	High accurate subaperture testing
	Yan, Fengtao1,2; Fan, Bin1; Hou, Xi1; Wu, Fan1; Lei, Baiping1
	2014
会议名称	Proceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
会议日期	2014
卷号	9282
页码	92822H
中文摘要	We introduced a high accurate subaperture testing method. This stitching method could reduce the interferometers deviation to the stitching results. This high accurate subaperture testing is determined by the data processing technique based on multiangle averaging method and Zernike polynomial fitting method. This technique does not require any assumptions about the surfaces under test. The experiment results shows that this high accurate subaperture testing method not only get the full absolute figure of the large mirrors but also can get the reference mirrors figure and calibrate it and the root mean square (rms) of residual figures between the two methods are -0.80nm and -0.87nm. © 2014 SPIE.
英文摘要	We introduced a high accurate subaperture testing method. This stitching method could reduce the interferometers deviation to the stitching results. This high accurate subaperture testing is determined by the data processing technique based on multiangle averaging method and Zernike polynomial fitting method. This technique does not require any assumptions about the surfaces under test. The experiment results shows that this high accurate subaperture testing method not only get the full absolute figure of the large mirrors but also can get the reference mirrors figure and calibrate it and the root mean square (rms) of residual figures between the two methods are -0.80nm and -0.87nm. © 2014 SPIE.
收录类别	EI
学科主题	Calibration - Data handling - Manufacture - Mirrors
语种	英语
ISSN号	0277786X
内容类型	会议论文
源URL	[http://ir.ioe.ac.cn/handle/181551/7621]
专题	光电技术研究所_先光中心
作者单位	1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, China 2.University of the Chinese Academy of Sciences, Beijing, China
推荐引用方式 GB/T 7714	Yan, Fengtao,Fan, Bin,Hou, Xi,et al. High accurate subaperture testing[C]. 见:Proceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment. 2014.

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