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	Influence Factors of Optical Surface Roughness in Traditional Polishing Process
	Shen Li-Jun; Wan Yong-Jian; Meng Kai
	2014
会议名称	Proceedings of SPIE: 7TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: ADVANCED OPTICAL MANUFACTURING TECHNOLOGIES
会议日期	2014
卷号	9281
页码	92811Y
通讯作者	Shen, LJ (reprint author), Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China.
中文摘要	Reducing the optical surface roughness is the key to improve the polishing quality of optical mirrors. Traditional polishing technology in ultra-smooth polishing glass has been used widely for a long time. In this paper, the theories of traditional polishing in polishing process were summarized. The problems in polishing procedure were analyzed and the influence factors of optical surface roughness were provided according to the polishing procedure of optical mirrors, and the relative measurements were pointed out. During the factors, polishing slurry and polishing pad are the important ones. Contrasting with former traditional polishing technology, roughness factors of new polishing slurry and polishing pad were analyzed and used in polishing process. The optical mirror of emptyset246mm was polished in traditional technology with new polishing slurry and polishing pad, the obtained testing results were surface roughness 3.421nm before polishing and 0.613nm after polishing.
英文摘要	Reducing the optical surface roughness is the key to improve the polishing quality of optical mirrors. Traditional polishing technology in ultra-smooth polishing glass has been used widely for a long time. In this paper, the theories of traditional polishing in polishing process were summarized. The problems in polishing procedure were analyzed and the influence factors of optical surface roughness were provided according to the polishing procedure of optical mirrors, and the relative measurements were pointed out. During the factors, polishing slurry and polishing pad are the important ones. Contrasting with former traditional polishing technology, roughness factors of new polishing slurry and polishing pad were analyzed and used in polishing process. The optical mirror of emptyset246mm was polished in traditional technology with new polishing slurry and polishing pad, the obtained testing results were surface roughness 3.421nm before polishing and 0.613nm after polishing.
学科主题	optical; ultra-smooth; roughness
语种	英语
ISSN号	0277-786X
内容类型	会议论文
源URL	[http://ir.ioe.ac.cn/handle/181551/7608]
专题	光电技术研究所_先光中心
作者单位	1.[Shen Li-Jun 2.Wan Yong-Jian 3.Meng Kai] Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
推荐引用方式 GB/T 7714	Shen Li-Jun,Wan Yong-Jian,Meng Kai. Influence Factors of Optical Surface Roughness in Traditional Polishing Process[C]. 见:Proceedings of SPIE: 7TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: ADVANCED OPTICAL MANUFACTURING TECHNOLOGIES. 2014.

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