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	Design and experiment of testing an off-axis aspheric surface by computer generated hologram
	Li, Shijie1,2; Wu, Fan1; Chen, Qiang1; Fan, Bin1; Li, Lianghong1
	2013
会议名称	Proceedings of SPIE: Optical Measurement Systems for Industrial Inspection VIII
会议日期	2013
卷号	8788
页码	878833
中文摘要	To test an off-axis aspheric surface in high precision, a multiple combined computer generated hologram (CGH) is designed and fabrication. Multiple combined CGH which is a hologram including different areas with different purposes can not only measure off-axis aspheric surface, but also align every element in test system. The design methods of test CGH and alignment CGH were deduced in detail. Ray trace and B-spline were used to devise test CGH, reflection CGH was used to align interferometer and CGH, and hologram alignment mark was used to align CGH and off-axis aspheric surface. A design example was given to test an off-axis paraboloid with 50mm aperture and 35mm off-axis distance. Meanwhile, this CGH was fabricated and this paraboloid was measured by it. The test result (PV=0.305λiŒRMS=0.042λ) is matched well with the outcome verified by autocollimation (PV=0. 320λiŒRMS=0.043λ). At last, we analyzed and solved the noise in the CGH test result. It proves that these designs are correct and this method can test off-axis aspheric surface in high precision. © 2013 SPIE.
英文摘要	To test an off-axis aspheric surface in high precision, a multiple combined computer generated hologram (CGH) is designed and fabrication. Multiple combined CGH which is a hologram including different areas with different purposes can not only measure off-axis aspheric surface, but also align every element in test system. The design methods of test CGH and alignment CGH were deduced in detail. Ray trace and B-spline were used to devise test CGH, reflection CGH was used to align interferometer and CGH, and hologram alignment mark was used to align CGH and off-axis aspheric surface. A design example was given to test an off-axis paraboloid with 50mm aperture and 35mm off-axis distance. Meanwhile, this CGH was fabricated and this paraboloid was measured by it. The test result (PV=0.305λiŒRMS=0.042λ) is matched well with the outcome verified by autocollimation (PV=0. 320λiŒRMS=0.043λ). At last, we analyzed and solved the noise in the CGH test result. It proves that these designs are correct and this method can test off-axis aspheric surface in high precision. © 2013 SPIE.
收录类别	EI
学科主题	Aspherics - Holograms - Interpolation - Lithography - Optical data processing - Optical design - Optical testing - Optical variables measurement
语种	英语
ISSN号	0277786X
内容类型	会议论文
源URL	[http://ir.ioe.ac.cn/handle/181551/7601]
专题	光电技术研究所_先光中心
作者单位	1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China 2.University of Chinese Academy of Sciences, Beijing 100049, China
推荐引用方式 GB/T 7714	Li, Shijie,Wu, Fan,Chen, Qiang,et al. Design and experiment of testing an off-axis aspheric surface by computer generated hologram[C]. 见:Proceedings of SPIE: Optical Measurement Systems for Industrial Inspection VIII. 2013.

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