Design and experiment of testing an off-axis aspheric surface by computer generated hologram | |
Li, Shijie1,2; Wu, Fan1; Chen, Qiang1; Fan, Bin1; Li, Lianghong1 | |
2013 | |
会议名称 | Proceedings of SPIE: Optical Measurement Systems for Industrial Inspection VIII |
会议日期 | 2013 |
卷号 | 8788 |
页码 | 878833 |
中文摘要 | To test an off-axis aspheric surface in high precision, a multiple combined computer generated hologram (CGH) is designed and fabrication. Multiple combined CGH which is a hologram including different areas with different purposes can not only measure off-axis aspheric surface, but also align every element in test system. The design methods of test CGH and alignment CGH were deduced in detail. Ray trace and B-spline were used to devise test CGH, reflection CGH was used to align interferometer and CGH, and hologram alignment mark was used to align CGH and off-axis aspheric surface. A design example was given to test an off-axis paraboloid with 50mm aperture and 35mm off-axis distance. Meanwhile, this CGH was fabricated and this paraboloid was measured by it. The test result (PV=0.305λiŒRMS=0.042λ) is matched well with the outcome verified by autocollimation (PV=0. 320λiŒRMS=0.043λ). At last, we analyzed and solved the noise in the CGH test result. It proves that these designs are correct and this method can test off-axis aspheric surface in high precision. © 2013 SPIE. |
英文摘要 | To test an off-axis aspheric surface in high precision, a multiple combined computer generated hologram (CGH) is designed and fabrication. Multiple combined CGH which is a hologram including different areas with different purposes can not only measure off-axis aspheric surface, but also align every element in test system. The design methods of test CGH and alignment CGH were deduced in detail. Ray trace and B-spline were used to devise test CGH, reflection CGH was used to align interferometer and CGH, and hologram alignment mark was used to align CGH and off-axis aspheric surface. A design example was given to test an off-axis paraboloid with 50mm aperture and 35mm off-axis distance. Meanwhile, this CGH was fabricated and this paraboloid was measured by it. The test result (PV=0.305λiŒRMS=0.042λ) is matched well with the outcome verified by autocollimation (PV=0. 320λiŒRMS=0.043λ). At last, we analyzed and solved the noise in the CGH test result. It proves that these designs are correct and this method can test off-axis aspheric surface in high precision. © 2013 SPIE. |
收录类别 | EI |
学科主题 | Aspherics - Holograms - Interpolation - Lithography - Optical data processing - Optical design - Optical testing - Optical variables measurement |
语种 | 英语 |
ISSN号 | 0277786X |
内容类型 | 会议论文 |
源URL | [http://ir.ioe.ac.cn/handle/181551/7601] ![]() |
专题 | 光电技术研究所_先光中心 |
作者单位 | 1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China 2.University of Chinese Academy of Sciences, Beijing 100049, China |
推荐引用方式 GB/T 7714 | Li, Shijie,Wu, Fan,Chen, Qiang,et al. Design and experiment of testing an off-axis aspheric surface by computer generated hologram[C]. 见:Proceedings of SPIE: Optical Measurement Systems for Industrial Inspection VIII. 2013. |
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