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	Reconstructing in laser wavelength scanning interference test of aspheric surface
	Li, Lulu1,2; Zhao, Wenchuan1; Su, Xianyu2; Wu, Fan1; Fan, Bin1
	2012
会议名称	Proceedings of SPIE: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
会议日期	2012
卷号	8416
页码	841625
通讯作者	Li, L.
中文摘要	Laser interferometry measurement using the volatility of light, with the advantages on high resolution, high accuracy, high sensitivity and reproducibility, it has become the primary means of the optical shape measurement. Laser wavelength scanning interference moves the test aspheric mirror in the optical axis direction controlled by the electric translation stage precisely, gradually changes the relative distance between the aspheric test mirror and the interferometer. Thus the reference sphere wavefronts with different radius match automatically to different ring-zones of the aspheric mirror. Based on the laser wavelength scanning interference testing of aspheric surface, this paper calculates the center area and the annular area separately. In the annular area processing, the authors use Zernike polynomials to fit the phase diagram, then derivative along the radial direction, to extract the zero-phase points on the interferogram of each relative position, and get the angle between the normal and the aspheric axis, then rebuild the absolute position of the coordinate system of aspheric mirror. Experimental results show that the method has high accuracy and reliability. © 2012 SPIE.
英文摘要	Laser interferometry measurement using the volatility of light, with the advantages on high resolution, high accuracy, high sensitivity and reproducibility, it has become the primary means of the optical shape measurement. Laser wavelength scanning interference moves the test aspheric mirror in the optical axis direction controlled by the electric translation stage precisely, gradually changes the relative distance between the aspheric test mirror and the interferometer. Thus the reference sphere wavefronts with different radius match automatically to different ring-zones of the aspheric mirror. Based on the laser wavelength scanning interference testing of aspheric surface, this paper calculates the center area and the annular area separately. In the annular area processing, the authors use Zernike polynomials to fit the phase diagram, then derivative along the radial direction, to extract the zero-phase points on the interferogram of each relative position, and get the angle between the normal and the aspheric axis, then rebuild the absolute position of the coordinate system of aspheric mirror. Experimental results show that the method has high accuracy and reliability. © 2012 SPIE.
收录类别	EI
语种	英语
ISSN号	0277786X
内容类型	会议论文
源URL	[http://ir.ioe.ac.cn/handle/181551/7578]
专题	光电技术研究所_先光中心
作者单位	1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, 610209, China 2.School of Electronics and Information Engineering, Sichuan University, Chengdu, 610065, China
推荐引用方式 GB/T 7714	Li, Lulu,Zhao, Wenchuan,Su, Xianyu,et al. Reconstructing in laser wavelength scanning interference test of aspheric surface[C]. 见:Proceedings of SPIE: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies. 2012.

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