| Optical testing of large rough aspheric surface using far-infrared interferometer | |
| Wu Yongqian; Zhang Yudong; Wu Fan | |
| 2009 | |
| 会议名称 | Proceedings of SPIE International Symposium on Photoelectronic Detection and Imaging 2009 - Advances in Infrared Imaging and Applications |
| 会议日期 | 2009 |
| 卷号 | 7383 |
| 通讯作者 | Wu Yongqian |
| 中文摘要 | An far-infrared interferometer which can test rough surface is presented. It is based on the optical configuration of classical Fizeau interferometer. In addition, the design and system performance of an infrared system is presented. Using the infrared system, the far-infrared interferometer is capable of testing rough aspheric surfaces. The measuring error(RMS) is less than λ/200 (λ=10.6μm), this accuracy is able to fulfill the need of grinding primary mirror. |
| 英文摘要 | An far-infrared interferometer which can test rough surface is presented. It is based on the optical configuration of classical Fizeau interferometer. In addition, the design and system performance of an infrared system is presented. Using the infrared system, the far-infrared interferometer is capable of testing rough aspheric surfaces. The measuring error(RMS) is less than λ/200 (λ=10.6μm), this accuracy is able to fulfill the need of grinding primary mirror. |
| 收录类别 | EI |
| 语种 | 英语 |
| 内容类型 | 会议论文 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/7559]  |
| 专题 | 光电技术研究所_先光中心 |
| 作者单位 | 中国科学院光电技术研究所 |
| 推荐引用方式 GB/T 7714 | Wu Yongqian,Zhang Yudong,Wu Fan. Optical testing of large rough aspheric surface using far-infrared interferometer[C]. 见:Proceedings of SPIE International Symposium on Photoelectronic Detection and Imaging 2009 - Advances in Infrared Imaging and Applications. 2009. |
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