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	Far-infrared Fizeau interferometer for large aspheric mirror
	Wu Yongqian; Zhang Yudong
	2009
会议名称	Proceedings of SPIE 2009 Symposium on Photonics and Optoelectronics Large Mirrors and Telescopes
会议日期	2009
卷号	7281
通讯作者	Wu Yongqian
中文摘要	The design and system performance of a far-infrared interferometer with which to test rough aspheric surfaces are presented. It is based on the optical configuration of classical Fizeau interferometer. A CO2 laser is used as a light source operating at a 10.6μm wavelength. A He-Ne laser is introduced into the interferometer to solve problems concerning with alignment. The measuring error(RMS) of the interferometer is less than λ/200 (λ=10.6μm), this accuracy is able to fulfill the need of grinding primary mirror.
英文摘要	The design and system performance of a far-infrared interferometer with which to test rough aspheric surfaces are presented. It is based on the optical configuration of classical Fizeau interferometer. A CO2 laser is used as a light source operating at a 10.6μm wavelength. A He-Ne laser is introduced into the interferometer to solve problems concerning with alignment. The measuring error(RMS) of the interferometer is less than λ/200 (λ=10.6μm), this accuracy is able to fulfill the need of grinding primary mirror.
收录类别	EI
语种	英语
内容类型	会议论文
源URL	[http://ir.ioe.ac.cn/handle/181551/7557]
专题	光电技术研究所_先光中心
作者单位	中国科学院光电技术研究所
推荐引用方式 GB/T 7714	Wu Yongqian,Zhang Yudong. Far-infrared Fizeau interferometer for large aspheric mirror[C]. 见:Proceedings of SPIE 2009 Symposium on Photonics and Optoelectronics Large Mirrors and Telescopes. 2009.

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