多孔性二氧化硅减反膜胶体规律性研究

CORC > 上海光学精密机械研究所 > 中国科学院上海光学精密机械研究所 > 高功率激光物理国家实验室

	多孔性二氧化硅减反膜胶体规律性研究
	沈斌 ; 李海元 ; 熊怀 ; 张旭 ; 唐永兴
刊名	中国激光
	2014
卷号	41 期号:9 页码:906002
关键词	材料溶胶凝胶二氧化硅减反膜稳定性粒径
其他题名	Studyon the Colloidal Regularityof Porous SiO_2 Antireflective Coatings
通讯作者	沈斌, 中国科学院上海光学精密机械研究所高功率激光物理联合实验室, 上海 201800, 中国. ; 李海元, 中国科学院上海光学精密机械研究所高功率激光物理联合实验室, 上海 201800, 中国. ; 熊怀, 中国科学院上海光学精密机械研究所高功率激光物理联合实验室, 上海 201800, 中国. ; 张旭, 中国科学院上海光学精密机械研究所高功率激光物理联合实验室, 上海 201800, 中国. ; 唐永兴, 中国科学院上海光学精密机械研究所高功率激光物理联合实验室, 上海 201800, 中国.
中文摘要	溶胶凝胶法制备减反膜在高功率激光装置中有着重要运用,通过控制水与正硅酸乙酯(TEOS)不同物质的量之比制备不同粒径大小的二氧化硅悬胶体及二氧化硅减反膜,可以研究悬胶体粒径大小对溶液及膜层的激光破坏阈值、光学减反效率稳定性影响。结果表明制备获得的多孔性SiO_2减反膜透射率均高于99.5%,激光破坏阈值均大于62J/cm~2(1064nm,15ns),其中粒径小的SiO_2减反膜透射率达到99.75%,激光破坏阈值高达77.42J/cm~2(1064nm,15ns)。随着水酯物质的量比值增大,悬胶体溶液平均粒径增大,当水酯物质的量比值大于3.5时粒径增大幅度加快;粒径在10nm以下的溶液具有优异的稳定性,溶液颗粒大小、粘度等性能基本保持不变。在不同湿度环境下研究不同粒径膜层的稳定性,所有膜层在高湿度环境中透射率有所下降,其中大粒径膜层下降更明显,化学膜更适合在湿度低的环境下使用。
英文摘要	Antireflective coatings prepared by sol gel method are importantly used in high power laser devices, the stability of colloidal, laser induced damage thresholds(LIDTs)and antireflective efficiencies of coatings resulted from different particle sizes silica colloidal suspensions and silica antireflective coatings are studied by controlling different molar ratios of water and tetraethoxysilane (TEOS).The results show that the transmittance of porous silica antireflective films is higher than 99.5%and LIDTs are greater than 62 J/cm~2(1064 nm, 15 ns), the transmittance and LIDTs of smaller particle size silica antireflective film reaches 99.75% and 77.42 J/cm~2 (1064 nm, 15 ns), respectively.The average particle sizes of colloidal suspensions increase with the mol ratio of H_2O:TEOS, the particle size quickly increases when the molar ratio of water and ester is greater than 3.5.The solution with particle size below10 nm has excellent stability, and the particle size and viscosity of the solution is almost not unchanged.The stability of films with different particle sizes in different humidities is researched, all the films′transmittance in high humidity drops and the film with larger particle size has more obvious decrease in transmittance, and therefore the chemical films are more suitable for the use in low humidity environment.
收录类别	EI
语种	中文
内容类型	期刊论文
版本	出版稿
源URL	[http://ir.siom.ac.cn/handle/181231/12478]
专题	上海光学精密机械研究所_高功率激光物理国家实验室
作者单位	1.Shen Bin, Joint Laboratory on High Power Laser and Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China. 2.Li Haiyuan, Joint Laboratory on High Power Laser and Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China. 3.Xiong Huai, Joint Laboratory on High Power Laser and Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China. 4.Zhang Xu, Joint Laboratory on High Power Laser and Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China. 5.Tang Yongxing, Joint Laboratory on High Power Laser and Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China.
推荐引用方式 GB/T 7714	沈斌,李海元,熊怀,等. 多孔性二氧化硅减反膜胶体规律性研究[J]. 中国激光,2014,41(9):906002.
APA	沈斌,李海元,熊怀,张旭,&唐永兴.(2014).多孔性二氧化硅减反膜胶体规律性研究.中国激光,41(9),906002.
MLA	沈斌,et al."多孔性二氧化硅减反膜胶体规律性研究".中国激光 41.9(2014):906002.