Remove trefoil aberration of project objectiveusing lens surface re-polishing technology

CORC > 长春光学精密机械与物理研究所 > 中国科学院长春光学精密机械与物理研究所 > 中科院长春光机所知识产出

	Remove trefoil aberration of project objectiveusing lens surface re-polishing technology
	Zhao, Y.; P. Wang; Z. Shi; Y. Gu; C. Liu and S. Men
刊名	Guangxue Xuebao/Acta Optica Sinica
	2015
卷号	35 期号:8
英文摘要	It is impossible to remove the high order aberrations of minimum aberration project objective only with adjustable structures, which is a bottleneck to restrain further optimization. Ion beam figuring (IBF) instrument is widely used in optical lens manufacturing. IBF can well control low and middle frequency figuring errors to obtain high accuracy figuring polish. The wavefrint error of projection lens small scale model is analyzed using fringe Zernike polynomials, which contains a large amount trefoil aberration. One surfaces of the objective is chosen to remove designated figures using IBF to compensate trefoil aberration of the whole system. Simulation and experiment results show that trefoil aberration is well controlled, and the wavefront error is reduced from 29.6 nm (RMS) to 12.7 nm (RMS). The quality of objective is greatly improved, which proves the corrextness and applicability of this trefoil aberration compensating method. , 2015, Chinese Optical Society. All right reserved.
收录类别	EI
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/56225]
专题	长春光学精密机械与物理研究所_中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Zhao, Y.,P. Wang,Z. Shi,et al. Remove trefoil aberration of project objectiveusing lens surface re-polishing technology[J]. Guangxue Xuebao/Acta Optica Sinica,2015,35(8).
APA	Zhao, Y.,P. Wang,Z. Shi,Y. Gu,&C. Liu and S. Men.(2015).Remove trefoil aberration of project objectiveusing lens surface re-polishing technology.Guangxue Xuebao/Acta Optica Sinica,35(8).
MLA	Zhao, Y.,et al."Remove trefoil aberration of project objectiveusing lens surface re-polishing technology".Guangxue Xuebao/Acta Optica Sinica 35.8(2015).