Design of a varied-line-space plane grating in EUV spectrum

CORC > 长春光学精密机械与物理研究所 > 中国科学院长春光学精密机械与物理研究所 > 中科院长春光机所知识产出

	Design of a varied-line-space plane grating in EUV spectrum
	Jiang, Y.; Bayanheshig; S. Yang; X. Zhao; W. Li and N. Wu
刊名	Guangxue Xuebao/Acta Optica Sinica
	2015
卷号	35 期号:1
英文摘要	To make varied-line-space holographic grating which in applied in the extreme ultraviolet band (50~ 150 nm), a new optimization algorithm applied to spherical wavefront system is proposed, named the improved local optimization algorithm. According to the request of instruments, expected varied-line-space holographic grating density function is built. Based on this density function, the merit function is given, of which characteristic is transforming four merit functions to one merit function which has multivariate and nonlinear constrains. Using the improved local algorithm, the error of groove density coefficient is reduced and the resolution of gratings is improved due to the weighted, the diversity of the initial value, the limitation of the recording parameters values range and the constraint of groove density coefficients. Compared with the conventional local optimization algorithm, using the improved local optimization algorithm makes absolute error between design and expected groove density in 0~0.02 line/mm range. And the order of magnitude is improved and the resolution increases from 4000 to above 17000. Results show that by adopting the suited optimization algorithm, varied-line-space plane grating with a high resolution can be made in the spherical wavefront system. , 2015, Chinese Optical Society. All right reserved.
收录类别	EI
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/56167]
专题	长春光学精密机械与物理研究所_中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Jiang, Y.,Bayanheshig,S. Yang,et al. Design of a varied-line-space plane grating in EUV spectrum[J]. Guangxue Xuebao/Acta Optica Sinica,2015,35(1).
APA	Jiang, Y.,Bayanheshig,S. Yang,X. Zhao,&W. Li and N. Wu.(2015).Design of a varied-line-space plane grating in EUV spectrum.Guangxue Xuebao/Acta Optica Sinica,35(1).
MLA	Jiang, Y.,et al."Design of a varied-line-space plane grating in EUV spectrum".Guangxue Xuebao/Acta Optica Sinica 35.1(2015).