Motion-precision control in bonnet-polishing

CORC > 长春光学精密机械与物理研究所 > 中国科学院长春光学精密机械与物理研究所 > 中科院长春光机所知识产出

	Motion-precision control in bonnet-polishing
	Wang, F.; J. Zhang; L.-R. Peng; G.-W. Wang and Y.-X. Sui
刊名	Guangxue Jingmi Gongcheng/Optics and Precision Engineering
	2015
卷号	23 期号:8 页码:2220-2228
英文摘要	To meet the ultra-high precision manufacture demands of spherical surfaces and aspherical surfaces in an optical system of Deep Ultra Violet (DUV) and Extreme Ultra Violet (EUV), a series of motion-precision control methods in bonnet-polishing were proposed. Firstly, the temperatures of main operation units were finely controlled to allow the motion-precision of polishing to be to 50 m. Then, the coordinates transmitting method was used to guarantee the two-dimension unity between measured data and operating data to be 0.30-0.70 mm. Furthermore, the convergence efficiency of surface-error in fine polishing was improved by bonnet removal estimation method and feedback correction method. Finally, the vertical position accuracy between bonnet and work piece was improved to 10 m by probing-correction method. The experiment results on a actual polishing by using motion-precision control methods indicate that the surface machining accuracy is 0.8 nm (RMS) in polishing a flat with a diameter of 280 mm, and that is 1.1 nm (RMS) in polishing a concave with a diameter of 160 mm. The proposed methods realize ultra-high precision polishing for spherical surfaces and aspherical surfaces, and they are also suitable for other contact small tool computer controlled polishing. , 2015, Chinese Academy of Sciences. All right reserved.
收录类别	EI
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/56093]
专题	长春光学精密机械与物理研究所_中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Wang, F.,J. Zhang,L.-R. Peng,et al. Motion-precision control in bonnet-polishing[J]. Guangxue Jingmi Gongcheng/Optics and Precision Engineering,2015,23(8):2220-2228.
APA	Wang, F.,J. Zhang,L.-R. Peng,&G.-W. Wang and Y.-X. Sui.(2015).Motion-precision control in bonnet-polishing.Guangxue Jingmi Gongcheng/Optics and Precision Engineering,23(8),2220-2228.
MLA	Wang, F.,et al."Motion-precision control in bonnet-polishing".Guangxue Jingmi Gongcheng/Optics and Precision Engineering 23.8(2015):2220-2228.