Calculation of removal function of ion beam figuring and polishing experiment

CORC > 长春光学精密机械与物理研究所 > 中国科学院长春光学精密机械与物理研究所 > 中科院长春光机所知识产出

	Calculation of removal function of ion beam figuring and polishing experiment
	Tang, W.; W.-J. Deng; L.-G. Zheng and X.-J. Zhang
刊名	Guangxue Jingmi Gongcheng/Optics and Precision Engineering
	2015
卷号	23 期号:1 页码:31-39
英文摘要	As the method to get the removal function by traditional Ion Beam Figuring (IBF) has complicated operation and higher costs, this paper proposes a new method to calculate the removal function. The method uses the Faraday cup scan to measure and calibrate the temporal distribution of ion beams and to obtain the different working parameters of ion sources which corresponds to removal functions. Firstly, the material removal theory of IBF was studied based on the Sigmund sputtering theory, and the influence of ion beam distribution on the removal function was researched. A simplified IBF removal function model was proposed. Then, an experiment was conducted to obtain the relationship between the temporal distribution of ion beam and the related parameter of removal function, and the different removal functions of various working parameters were calculated with the combination of the basic removal experiment and Faraday cup scan results. Experiments were performed on silicon and fused silica, and the experimental results show that the peak value of the removal function for the same material is proportional to the that of the scan result. A mirror with a 800 mm silicon flat modification layer was polished, obtained the Root Mean Square(RMS) of surface error is 57.866 nm. After polishing for two times, the RMS is 11.837 nm, and the convergence rate is up to 4.89. These results meet the requirements of optical fabrication for polishing accuracy and improve the determining efficiency for removal functions. , 2015, Chinese Academy of Sciences. All right reserved.
收录类别	EI
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/56091]
专题	长春光学精密机械与物理研究所_中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Tang, W.,W.-J. Deng,L.-G. Zheng and X.-J. Zhang. Calculation of removal function of ion beam figuring and polishing experiment[J]. Guangxue Jingmi Gongcheng/Optics and Precision Engineering,2015,23(1):31-39.
APA	Tang, W.,W.-J. Deng,&L.-G. Zheng and X.-J. Zhang.(2015).Calculation of removal function of ion beam figuring and polishing experiment.Guangxue Jingmi Gongcheng/Optics and Precision Engineering,23(1),31-39.
MLA	Tang, W.,et al."Calculation of removal function of ion beam figuring and polishing experiment".Guangxue Jingmi Gongcheng/Optics and Precision Engineering 23.1(2015):31-39.