Optical Properties Investigation of p-Type ZnO Film Based on Doping by Diffusion | |
F. Chen; D. Fang; S. P. Wang; X. Fang; J. L. Tang; H. F. Zhao; F. Fang; X. Y. Chu; J. H. Li; F. Wang | |
刊名 | Spectroscopy and Spectral Analysis
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2015 | |
卷号 | 35期号:7 |
英文摘要 | The main purpose of this paper is to investigate the optical properties of p-type ZnO film based on P doping.ZnO film was grown by Atomic layer deposition(ALD)on InP subsrate in this experiment,and phosphorus diffused into ZnO lattice by annealing treatment at different temperature(500,700℃).The optical properties of samples were investigated by photoluminescence( PL)spectroscopy,which indicated that the annealing temperature is the important factor influencing the phosphorus diffusion doping.The low-temperature PL spectra of the sample which annealed at 700℃for 1hexhibited acceptor related emission peaks located at 3.351,3.311,3.246and 3.177eV,which were attributed to A°X,FA,DAP and DAP-1LO,respectively. The acceptor binding energy is estimated to be about 122meV,which is agreed with the theoretic values in phosphorus-doped ZnO films.In this paper,through thermal diffusion method to realize the p-type doped ZnO thin films,it solved the main problems which limited the development of ZnO based optoelectronic devices,and has an important significance for the development of the ZnO semiconductor materials and ZnO based photoelectric device |
收录类别 | SCI |
语种 | 英语 |
内容类型 | 期刊论文 |
源URL | [http://ir.ciomp.ac.cn/handle/181722/55934] ![]() |
专题 | 长春光学精密机械与物理研究所_中科院长春光机所知识产出 |
推荐引用方式 GB/T 7714 | F. Chen,D. Fang,S. P. Wang,et al. Optical Properties Investigation of p-Type ZnO Film Based on Doping by Diffusion[J]. Spectroscopy and Spectral Analysis,2015,35(7). |
APA | F. Chen.,D. Fang.,S. P. Wang.,X. Fang.,J. L. Tang.,...&X. H. Ma and Z. P. Wei.(2015).Optical Properties Investigation of p-Type ZnO Film Based on Doping by Diffusion.Spectroscopy and Spectral Analysis,35(7). |
MLA | F. Chen,et al."Optical Properties Investigation of p-Type ZnO Film Based on Doping by Diffusion".Spectroscopy and Spectral Analysis 35.7(2015). |
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