Path planning and parameter optimization of uniform removal in active feed polishing

CORC > 长春光学精密机械与物理研究所 > 中国科学院长春光学精密机械与物理研究所 > 中科院长春光机所知识产出

	Path planning and parameter optimization of uniform removal in active feed polishing
	Liu, J.; S. Z. Wang; C. L. Zhang; L. H. Zhang and H. N. Chen
刊名	Optical Engineering
	2015
卷号	54 期号:6 页码:8
英文摘要	A high-quality ultrasmooth surface is demanded in short-wave optical systems. However, the existing polishing methods have difficulties meeting the requirement on spherical or aspheric surfaces. As a new kind of small tool polishing method, active feed polishing (AFP) could attain a surface roughness of less than 0.3 nm (RMS) on spherical elements, although AFP may magnify the residual figure error or mid-frequency error. The purpose of this work is to propose an effective algorithm to realize uniform removal of the surface in the processing. At first, the principle of the AFP and the mechanism of the polishing machine are introduced. In order to maintain the processed figure error, a variable pitch spiral path planning algorithm and the dwell time-solving model are proposed. For suppressing the possible mid-frequency error, the uniformity of the synthesis tool path, which is generated by an arbitrary point at the polishing tool bottom, is analyzed and evaluated, and the angular velocity ratio of the tool spinning motion to the revolution motion is optimized. Finally, an experiment is conducted on a convex spherical surface and an ultrasmooth surface is finally acquired. In conclusion, a high-quality ultrasmooth surface can be successfully obtained with little degradation of the figure and mid-frequency errors by the algorithm. (C) 2015 Society of Photo-Optical Instrumentation Engineers (SPIE)
收录类别	SCI ; EI
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/55332]
专题	长春光学精密机械与物理研究所_中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Liu, J.,S. Z. Wang,C. L. Zhang,et al. Path planning and parameter optimization of uniform removal in active feed polishing[J]. Optical Engineering,2015,54(6):8.
APA	Liu, J.,S. Z. Wang,C. L. Zhang,&L. H. Zhang and H. N. Chen.(2015).Path planning and parameter optimization of uniform removal in active feed polishing.Optical Engineering,54(6),8.
MLA	Liu, J.,et al."Path planning and parameter optimization of uniform removal in active feed polishing".Optical Engineering 54.6(2015):8.