Study on the roughness evolution of optical surfaces during ion beam sputtering

CORC > 长春光学精密机械与物理研究所 > 中国科学院长春光学精密机械与物理研究所 > 中科院长春光机所知识产出

	Study on the roughness evolution of optical surfaces during ion beam sputtering
	Liang, X.; X. Wang; Y. Q. Gu; J. J. Zheng; H. J. Yang and Y. X. Sui
刊名	Optical Engineering
	2015
卷号	54 期号:10 页码:16
英文摘要	Ion beam machining technology has been extensively adopted to obtain an ultraprecision surface in ultraviolet lithography optics. However, there exist complex mechanisms leading the surface to evolve complicated topographies and increasing roughness. We build a kinetic model integrating with the typical sputter theory and a bond-counting Monte Carlo algorithm based on the compound materials to investigate the surface roughness evolution during ion beam sputtering. The influences of primary sputter, reflection, secondary sputter, geometrical shadowing, redeposition, and thermal diffusion were all taken into consideration to compose a dynamic evolution process. In calculation, using this model the surface first possesses a period of smoothing and then goes into a roughening stage, where the roughness follows the regular power law. Quantitative analyses of surface roughness derived from calculations are also examined and compared with experiments. (C) 2015 Society of Photo-Optical Instrumentation Engineers (SPIE)
收录类别	SCI ; EI
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/55319]
专题	长春光学精密机械与物理研究所_中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Liang, X.,X. Wang,Y. Q. Gu,et al. Study on the roughness evolution of optical surfaces during ion beam sputtering[J]. Optical Engineering,2015,54(10):16.
APA	Liang, X.,X. Wang,Y. Q. Gu,J. J. Zheng,&H. J. Yang and Y. X. Sui.(2015).Study on the roughness evolution of optical surfaces during ion beam sputtering.Optical Engineering,54(10),16.
MLA	Liang, X.,et al."Study on the roughness evolution of optical surfaces during ion beam sputtering".Optical Engineering 54.10(2015):16.