Detection of medium-range-order structure in amorphous germanium films by spectroscopic ellipsometry

	Detection of medium-range-order structure in amorphous germanium films by spectroscopic ellipsometry
	Wang, X. D.; B. Chen; H. F. Wang; B. Chen; S. J. Liu; Z. X. Cui; B. Li; J. B. Wang; S. M. Wang and Y. P. Li
刊名	Journal of Applied Crystallography
	2015
卷号	48 页码:1011-1015
英文摘要	Amorphous germanium (a-Ge) films in the thickness range of 5.2-370.7 nm were prepared by radio frequency magnetron sputtering. Spectroscopic ellipsometry analysis shows that less than 3% of medium-range order exists in a-Ge under the reported deposition conditions.
收录类别	SCI ; EI
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/55217]
专题	长春光学精密机械与物理研究所_中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Wang, X. D.,B. Chen,H. F. Wang,et al. Detection of medium-range-order structure in amorphous germanium films by spectroscopic ellipsometry[J]. Journal of Applied Crystallography,2015,48:1011-1015.
APA	Wang, X. D..,B. Chen.,H. F. Wang.,B. Chen.,S. J. Liu.,...&S. M. Wang and Y. P. Li.(2015).Detection of medium-range-order structure in amorphous germanium films by spectroscopic ellipsometry.Journal of Applied Crystallography,48,1011-1015.
MLA	Wang, X. D.,et al."Detection of medium-range-order structure in amorphous germanium films by spectroscopic ellipsometry".Journal of Applied Crystallography 48(2015):1011-1015.