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	Absolute testing of flats in sub-stitching interferometer by rotation-shift method
	Jia, Xin; Xu, Fuchao; Xie, Weimin; Li, Yun; Xing, Tingwen
	2015
会议名称	Proceedings of SPIE - The International Society for Optical Engineering
会议日期	2015
卷号	9628
页码	962819
中文摘要	Most of the commercial available sub-aperture stitching interferometers measure the surface with a standard lens that produces a reference wavefront, and the precision of the interferometer is generally limited by the standard lens. The test accuracy can be achieved by removing the error of reference surface by the absolute testing method. When the testing accuracy (repeatability and reproducibility) is close to 1nm, in addition to the reference surface, other factors will also affect the measuring accuracy such as environment, zoom magnification, stitching precision, tooling and fixture, the characteristics of optical materials and so on. We establish a stitching system in the thousand level cleanroom. The stitching system is including the Zygo interferometer, the motion system with Bilz active isolation system at level VC-F. We review the traditional absolute flat testing methods and emphasize the method of rotation-shift functions. According to the rotation-shift method we get the profile of the reference lens and the testing lens. The problem of the rotation-shift method is the tilt error. In the motion system, we control the tilt error no more than 4 second to reduce the error. In order to obtain higher testing accuracy, we analyze the influence surface shape measurement accuracy by recording the environment error with the fluke testing equipment. © 2015 SPIE.
英文摘要	Most of the commercial available sub-aperture stitching interferometers measure the surface with a standard lens that produces a reference wavefront, and the precision of the interferometer is generally limited by the standard lens. The test accuracy can be achieved by removing the error of reference surface by the absolute testing method. When the testing accuracy (repeatability and reproducibility) is close to 1nm, in addition to the reference surface, other factors will also affect the measuring accuracy such as environment, zoom magnification, stitching precision, tooling and fixture, the characteristics of optical materials and so on. We establish a stitching system in the thousand level cleanroom. The stitching system is including the Zygo interferometer, the motion system with Bilz active isolation system at level VC-F. We review the traditional absolute flat testing methods and emphasize the method of rotation-shift functions. According to the rotation-shift method we get the profile of the reference lens and the testing lens. The problem of the rotation-shift method is the tilt error. In the motion system, we control the tilt error no more than 4 second to reduce the error. In order to obtain higher testing accuracy, we analyze the influence surface shape measurement accuracy by recording the environment error with the fluke testing equipment. © 2015 SPIE.
收录类别	SCI ; EI
学科主题	Errors - Interferometers - Measurements - Optical testing - Rotation - Systems analysis - Units of measurement
语种	英语
ISSN号	0277-786X
内容类型	会议论文
源URL	[http://ir.ioe.ac.cn/handle/181551/7502]
专题	光电技术研究所_应用光学研究室（二室）
作者单位	Lab of Applied Optics, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, China
推荐引用方式 GB/T 7714	Jia, Xin,Xu, Fuchao,Xie, Weimin,et al. Absolute testing of flats in sub-stitching interferometer by rotation-shift method[C]. 见:Proceedings of SPIE - The International Society for Optical Engineering. 2015.

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