Absolute testing of flats with all terms by using even and odd functions
Jia, Xin; Xu, Fuchao; Xing, Tingwen; Liu, Zhixiang
2013
会议名称Proceedings of SPIE: Modeling Aspects in Optical Metrology IV, 2013
会议日期2013
卷号8789
页码878911
中文摘要In Cartesian coordinate system, a flat can be expressed as the sum of even-odd, odd-even, even-even and oddodd functions. In the traditional three-flat even and odd function method, odd-odd function is difficult to obtain. In our paper the odd-odd function can be solved by use the Dove prism which can rotate the optical axis. The odd-odd function can calculate exactly. The even-odd, odd-even, even-even can be solved by rotating the flat 180 like the traditional method. Only five configurations are used to test the flats. The theoretical derivation and analysis are presented. © 2013 SPIE.
英文摘要In Cartesian coordinate system, a flat can be expressed as the sum of even-odd, odd-even, even-even and oddodd functions. In the traditional three-flat even and odd function method, odd-odd function is difficult to obtain. In our paper the odd-odd function can be solved by use the Dove prism which can rotate the optical axis. The odd-odd function can calculate exactly. The even-odd, odd-even, even-even can be solved by rotating the flat 180 like the traditional method. Only five configurations are used to test the flats. The theoretical derivation and analysis are presented. © 2013 SPIE.
收录类别EI
学科主题Measurements - Molecular physics - Optical testing
语种英语
ISSN号0277786X
内容类型会议论文
源URL[http://ir.ioe.ac.cn/handle/181551/7478]  
专题光电技术研究所_应用光学研究室(二室)
作者单位Lab of Applied Optics, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
推荐引用方式
GB/T 7714
Jia, Xin,Xu, Fuchao,Xing, Tingwen,et al. Absolute testing of flats with all terms by using even and odd functions[C]. 见:Proceedings of SPIE: Modeling Aspects in Optical Metrology IV, 2013. 2013.
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