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	Design and location deviation of the computer generated holograms used for aspheric surface testing
	Feng, Jie1,2; Deng, Chao1; Xing, Tingwen1
	2013
会议名称	Proceedings of SPIE: Optical Measurement Systems for Industrial Inspection VIII
会议日期	2013
卷号	8788
页码	87882O
中文摘要	Computer generated holograms (CGHs) are widely used in aspheric surface testing and metrology. The primary role of the CGHs is to generate any desired wavefronts to realize phase compensation. In order to eliminate alignment errors of CGH and the tested aspheric, this paper designs a new layout of CGH that has the advantages of high alignment accuracy and simple experimental operation. And further the influence of the location deviation of CGH and the tested aspheric mirror to the entire system is discussed; it shows that the error introduced by the CGH and the tested aspheric mirror tilting around the x-axis or y-axis as well as the tested aspheric mirror moving along the x-axis or y-axis direction is large. Then the CGH design principle and design process are reviewed. Finally, a CGH is designed for measurement of an aspheric mirror (diameter=226mm, F-number =2.2). Interferometric test results of an aspheric mirror show that the whole test system obtains the demanded high accuracy. © 2013 SPIE.
英文摘要	Computer generated holograms (CGHs) are widely used in aspheric surface testing and metrology. The primary role of the CGHs is to generate any desired wavefronts to realize phase compensation. In order to eliminate alignment errors of CGH and the tested aspheric, this paper designs a new layout of CGH that has the advantages of high alignment accuracy and simple experimental operation. And further the influence of the location deviation of CGH and the tested aspheric mirror to the entire system is discussed; it shows that the error introduced by the CGH and the tested aspheric mirror tilting around the x-axis or y-axis as well as the tested aspheric mirror moving along the x-axis or y-axis direction is large. Then the CGH design principle and design process are reviewed. Finally, a CGH is designed for measurement of an aspheric mirror (diameter=226mm, F-number =2.2). Interferometric test results of an aspheric mirror show that the whole test system obtains the demanded high accuracy. © 2013 SPIE.
收录类别	EI
学科主题	Aspherics - Computer generated holography - Holograms - Mirrors - Optical data processing - Optical variables measurement
语种	英语
ISSN号	0277786X
内容类型	会议论文
源URL	[http://ir.ioe.ac.cn/handle/181551/7476]
专题	光电技术研究所_应用光学研究室（二室）
作者单位	1.Lab of Applied Optics, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China 2.University of Chinese Academy of Sciences, Beijing 100049, China
推荐引用方式 GB/T 7714	Feng, Jie,Deng, Chao,Xing, Tingwen. Design and location deviation of the computer generated holograms used for aspheric surface testing[C]. 见:Proceedings of SPIE: Optical Measurement Systems for Industrial Inspection VIII. 2013.

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