QQ客服 官方微博 反馈留言

	Experiment analysis of absolute flatness testing
	Xin, Jia; Xing, Tingwen; Lin, Wumei; Liao, Zhijie
	2012
会议名称	Proceedings of SPIE: Metrology, Inspection, and Process Control for Microlithography XXVI
会议日期	2012
卷号	8324
页码	83242X
通讯作者	Xin, J. (jiaxinhust@yahoo.com.cn)
中文摘要	Result of the testing contain the reference surface errors and test surface errors in the high-accuracy Phase shifting interferometer which test the relative phase between the two surface. The test accuracy can be achieved by removing the error of reference surface. In this case, one of body of so-called absolute testing must be used which can test the systematic errors, including the reference surface, of the instrument to be used to improve the test accuracy. The accuracy of the interferometer needs different methods to determine in the high accuracy testing. Even-Odd function method and rotation shear method is introduced in this paper. We use the Zygo interferometer Verifire Asphere to do the experiment and analyze the errors caused by data processing and interpolation. The result of the experiment can determine the accuracy of our arithmetic. © 2012 SPIE.
英文摘要	Result of the testing contain the reference surface errors and test surface errors in the high-accuracy Phase shifting interferometer which test the relative phase between the two surface. The test accuracy can be achieved by removing the error of reference surface. In this case, one of body of so-called absolute testing must be used which can test the systematic errors, including the reference surface, of the instrument to be used to improve the test accuracy. The accuracy of the interferometer needs different methods to determine in the high accuracy testing. Even-Odd function method and rotation shear method is introduced in this paper. We use the Zygo interferometer Verifire Asphere to do the experiment and analyze the errors caused by data processing and interpolation. The result of the experiment can determine the accuracy of our arithmetic. © 2012 SPIE.
收录类别	EI
语种	英语
ISSN号	0277786X
内容类型	会议论文
源URL	[http://ir.ioe.ac.cn/handle/181551/7470]
专题	光电技术研究所_应用光学研究室（二室）
作者单位	Lab. of Applied Optics, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
推荐引用方式 GB/T 7714	Xin, Jia,Xing, Tingwen,Lin, Wumei,et al. Experiment analysis of absolute flatness testing[C]. 见:Proceedings of SPIE: Metrology, Inspection, and Process Control for Microlithography XXVI. 2012.

个性服务

查看访问统计

相关权益政策

暂无数据

收藏/分享

除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。