Error analysis of sub-aperture stitching interferometry
Jia, Xin; Xu, Fuchao; Xie, Weimin; Xing, Tingwen
2012
会议名称Proceedings of SPIE: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
会议日期2012
卷号8417
页码84172X
通讯作者Jia, X.
中文摘要Large-aperture optical elements are widely employed in high-power laser system, astronomy, and outer-space technology. Sub-aperture stitching is an effective way to extend the lateral and vertical dynamic range of a conventional interferometer. With the aim to provide the accuracy of equipment, this paper simulates the arithmetic to analyze the errors. The Selection of stitching mode and setting of the number of subaperture is given. According to the programmed algorithms simulation stitching is performed for testing the algorithm. In this paper, based on the Matlab we simulate the arithmetic of Sub-aperture stitching. The sub-aperture stitching method can also be used to test the free formed surface. The freeformed surface is created by Zernike polynomials. The accuracy has relationship with the errors of tilting, positioning. Through the stitching the medium spatial frequency of the surface can be tested. The results of errors analysis by means of Matlab are shown that how the tilting and positioning errors to influence the testing accuracy. The analysis of errors can also be used in other interferometer systems. © 2012 SPIE.
英文摘要Large-aperture optical elements are widely employed in high-power laser system, astronomy, and outer-space technology. Sub-aperture stitching is an effective way to extend the lateral and vertical dynamic range of a conventional interferometer. With the aim to provide the accuracy of equipment, this paper simulates the arithmetic to analyze the errors. The Selection of stitching mode and setting of the number of subaperture is given. According to the programmed algorithms simulation stitching is performed for testing the algorithm. In this paper, based on the Matlab we simulate the arithmetic of Sub-aperture stitching. The sub-aperture stitching method can also be used to test the free formed surface. The freeformed surface is created by Zernike polynomials. The accuracy has relationship with the errors of tilting, positioning. Through the stitching the medium spatial frequency of the surface can be tested. The results of errors analysis by means of Matlab are shown that how the tilting and positioning errors to influence the testing accuracy. The analysis of errors can also be used in other interferometer systems. © 2012 SPIE.
收录类别EI
语种英语
ISSN号0277786X
内容类型会议论文
源URL[http://ir.ioe.ac.cn/handle/181551/7465]  
专题光电技术研究所_应用光学研究室(二室)
作者单位Lab of Applied Optics, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
推荐引用方式
GB/T 7714
Jia, Xin,Xu, Fuchao,Xie, Weimin,et al. Error analysis of sub-aperture stitching interferometry[C]. 见:Proceedings of SPIE: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment. 2012.
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