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	Analysis of Absolute Testing based on Even-Odd Functions
	Jia Xin; Xing Tingwen; Lin wumei
	2010
会议名称	Proceedings of the SPIE - The International Society for Optical Engineering
会议日期	2010
卷号	7656
页码	76563E (6 pp.)
通讯作者	Jia Xin
中文摘要	Recently most of modern absolute measurement methods rotate the flat or sphere in the interferometer. So it is very important to exactly know how some errors such as angle rotation error, center excursion error influence the metrology. This paper analyses these errors how to influence testing accuracy by Zernike based on Even-Odd functions. We review traditional absolute testing of flats methods and emphasize the method of even and odd functions. The flat can be expressed as the sum of even-odd, odd-even, even-even and odd-odd functions. Through six measurements the profile of the flat can be calculated. We use 36 Zernike polynomials in polar coordinates to analysis the method. The polynomials can be separated by even-odd, odd-even, even-even and odd-odd parts. We substitute polynomials for surface data and change the arithmetic. Then we can analyze the every surface error data and exactly know the calculate accuracy of every term through the arithmetic. The results of errors analyze by means of Matlab are shown that how the angle rotation error to influence the accuracy. The errors analysis can also be used in other interferometer systems which have the motion of the coordinate system.
英文摘要	Recently most of modern absolute measurement methods rotate the flat or sphere in the interferometer. So it is very important to exactly know how some errors such as angle rotation error, center excursion error influence the metrology. This paper analyses these errors how to influence testing accuracy by Zernike based on Even-Odd functions. We review traditional absolute testing of flats methods and emphasize the method of even and odd functions. The flat can be expressed as the sum of even-odd, odd-even, even-even and odd-odd functions. Through six measurements the profile of the flat can be calculated. We use 36 Zernike polynomials in polar coordinates to analysis the method. The polynomials can be separated by even-odd, odd-even, even-even and odd-odd parts. We substitute polynomials for surface data and change the arithmetic. Then we can analyze the every surface error data and exactly know the calculate accuracy of every term through the arithmetic. The results of errors analyze by means of Matlab are shown that how the angle rotation error to influence the accuracy. The errors analysis can also be used in other interferometer systems which have the motion of the coordinate system.
收录类别	EI ; ISTP
语种	英语
内容类型	会议论文
源URL	[http://ir.ioe.ac.cn/handle/181551/7445]
专题	光电技术研究所_应用光学研究室（二室）
作者单位	中国科学院光电技术研究所
推荐引用方式 GB/T 7714	Jia Xin,Xing Tingwen,Lin wumei. Analysis of Absolute Testing based on Even-Odd Functions[C]. 见:Proceedings of the SPIE - The International Society for Optical Engineering. 2010.

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