Simple and rapid data-reduction method with pixel-level spatial frequency of shift-rotation method

	Simple and rapid data-reduction method with pixel-level spatial frequency of shift-rotation method
	Song, W.1,2; Hou, X.1; Wu, F.1; Wan, Y.1
刊名	Applied Optics
	2013
卷号	52 期号:24 页码:5974-5978
ISSN号	1559128X
通讯作者	Song, W. (songscu@163.com)
中文摘要	Absolute testing methods are commonly employed in surface metrology to calibrate the reference surface deviation and obtain the absolute deviation of the surface under test. A simple and reliable datareduction method of absolute shift-rotation method with rotational and translational measurements is presented here, which relies on the decomposition of the surface deviation into rotationally asymmetric and symmetric components. The rotationally asymmetric surface deviation can be simply obtained by classical N-position averaging method. After that, the two-dimensional problem of estimating the other rotationally symmetric surface deviation can be simplified to a one-dimensional problem, and it can be directly calculated out with pixel-level spatial frequency based on several measurements of different translations in one same direction. Since that no orthogonal polynomials fitting, such as Zernike polynomials, is required in the calculation, the data reduction of the method is simple and rapid. Experimental absolute results of spherical surfaces are given. © 2013 Optical Society of America.
英文摘要	Absolute testing methods are commonly employed in surface metrology to calibrate the reference surface deviation and obtain the absolute deviation of the surface under test. A simple and reliable datareduction method of absolute shift-rotation method with rotational and translational measurements is presented here, which relies on the decomposition of the surface deviation into rotationally asymmetric and symmetric components. The rotationally asymmetric surface deviation can be simply obtained by classical N-position averaging method. After that, the two-dimensional problem of estimating the other rotationally symmetric surface deviation can be simplified to a one-dimensional problem, and it can be directly calculated out with pixel-level spatial frequency based on several measurements of different translations in one same direction. Since that no orthogonal polynomials fitting, such as Zernike polynomials, is required in the calculation, the data reduction of the method is simple and rapid. Experimental absolute results of spherical surfaces are given. © 2013 Optical Society of America.
学科主题	Testing
收录类别	SCI ; EI
语种	英语
WOS记录号	WOS:000323881400016
内容类型	期刊论文
源URL	[http://ir.ioe.ac.cn/handle/181551/7019]
专题	光电技术研究所_先光中心
作者单位	1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China 2.University of Chinese Academy of Sciences, Beijing 100039, China
推荐引用方式 GB/T 7714	Song, W.,Hou, X.,Wu, F.,et al. Simple and rapid data-reduction method with pixel-level spatial frequency of shift-rotation method[J]. Applied Optics,2013,52(24):5974-5978.
APA	Song, W.,Hou, X.,Wu, F.,&Wan, Y..(2013).Simple and rapid data-reduction method with pixel-level spatial frequency of shift-rotation method.Applied Optics,52(24),5974-5978.
MLA	Song, W.,et al."Simple and rapid data-reduction method with pixel-level spatial frequency of shift-rotation method".Applied Optics 52.24(2013):5974-5978.